Applied Materials Please contact VTI for module repair, part duplication and custom design services. OEM PN VTI PN DESCRIPTION 0010-00563 5005105000 Supply, Power, 8300 Rev. E 0010-02862 6011100028 Refurbishment, Susceptor, TEOS, 6" 0010-09591 6011100038 Refurbishment, Assy, Susceptor, 200mm, BWCVD 0010-60015 6011100029 Refurbishment, C- Chuck 0015-09092 5005106176 Coil, Copper 0015-20035 5005701000 Screw,Aluminum,Bead-Blasted 0015-20213 5005330012 Screw, Captive, VMI, Modified 0020-00346 5005101002 Spring, Brush, RF 0020-00347 5005101000 Brush, RF 0020-00781 5005101001 Blade, Ground, RF, Hexode 0020-00846 5005106058 Viewport, Quartz, 4" 0020-01171 5005106166 Plate, Base, Left 0020-01172 5005106165 Plate, Base, Right 0020-01191 5005106159 Cover, Apex 0020-03310 5005106095 Plug, Vespel 0020-03398 5005106142 Insulating, Pipe, Quartz 0020-03426 5005106096 Plug, Pedestal, Vespel 0020-03656 5005106097 Screw, Vespel, 8-32 x 0.325 0020-03690 5005206000 Finger, Vespel Material Revision 0020-03690 5005206003 Finger, Fork, Ceramic 0020-04127 5005106075 Ring, Vespel 0020-06048 5005106068 Bushing, Valve, Throttle 0020-06315 5005106057 Viewport, Quartz, 3.6" 0020-06447 5005106079 Clamp 0020-09069 5005206031 Pin, Lifting, Viton Tip 0020-09602 5005206043 Manifold, Input 0020-09604E 5005206044 Feedthru, Gradient, Voltage 0020-09843 5005106212 Pin, Lift, Wafer 0020-09952 5005106127 Window, Front 0020-10134 5005206042 Manifold, Output, Plated 0020-10722 5005106213 Screw, Showerhead, Vented 0020-10730 5005106177 Alum, Finger 0020-10771 5005206017 Plate, Perforated 0020-10887 5005106178 Screw 0020-13740 Rev. A 5005701018 Screw, Shldr, 5/16-18 x 1L, Valve, Slit 0020-18362 5005106180 Holder, Pin, Lift 0020-18899 5005701017 Washer, Nozzle, Ultima, HDP-CVD 0020-20114 5005310011 Isolator, Bias, DC 0020-20117 5005380001 Conductor, Flex, DC, Bias 0020-20125 5005310013 Standoff,Bias,Ceramic,(5500 Endura) 0020-20126 5005310010 Stand-off, Bias, DC 0020-21366 5005701001 Screw, Shoulder, Modified 0020-21366 5005701015 Screw, Shoulder 0020-21901 5005330008 Bracket 0020-23041 5005206024 Clamp,Shield,Wafer,Aluminum,8" 0020-23587 5005206045 Spacer, Bracket 0020-24018 5005106188 Pin, Poly, SI, Quartz, Insulator 0020-24100 5005106186 Insulator, Quartz, 8", Preclean 2 0020-24706 5005106286 Ring, Cover 0020-27100 5005330005 Shield, Ring, Wafer 0020-27116 5005330013 Screw, Pin, Mod, DC B1 0020-27946 5005106111 Ring, Clamp, Titanium 0020-28117 5005330006 Clamp, Degas, Temp, High 0020-28117 5005330007 Clamp, Degas, Temp, High, Modified 0020-29143 5005330009 Cup, Outer 0020-29348 5005330010 Cup, Outer, Feedthru, IMPT 0020-29679 Rev. 2 5005106237 Disk, Shutter 0020-30347 5005106226 Tube, Isolation, External 0020-30447 Rev. B 5005206051 Plate, Blocker, P5000 0020-30678 5005106184 Ring, Vespel 0020-31016 5005106255 Housing, Feedthru, Delrin 0020-31064T 5005701016 Holder, Pin, HDP-CVD 0020-31425 5005106231 Mixer 0020-31626 5005106228 Flange, Insulating 0020-31628 5005106225 Ring, Insulation, Ardel 0020-31631 5005106227 Ring, Insulator, Contact, DC 0020-31740 5005106082 Screw, Vespel, 5300 0020-31918 5005106230 Plug, DC ESC, Recedded, Sic 0020-31919 5005106110 Plug, Bias, DC, Ni200 0020-32034 5005106107 Ring, Vespel 0020-21664 5005106283 Insulator, Source 0020-26254 5005106282 Insulator, Ceramic, Durasource, TTN 0020-32034 6005300012 Assy, Ring, Vespel, w/ Vespel Fingers 0020-32048 5005106084 Sleeve, Vespel, Threaded 0020-33538 Rev. 1 5005106217 Plate, OX, 200mm 0020-33785 5005106223 Plate, GDP 0020-34775 5005106276 Blocker, Silox, 8", Univch 0020-42285 5005106233 Plate, WxZ, EC, Blocker, 8" 0020-42287 5005106232 Plate, WxZ, EC, 8", Perf 0020-42303 5005106125 Plate, Aperture, U-Wave 0020-42316 5005106234 Screw, Showerhead 0020-70285 5005106215 Arm, Load 0020-70285 5005106216 Arm, Load 0020-94844 5005400015 Bushing, Leadthrough, Boron Nitride 0021-03104 5005106129 Screw, Slotted 0021-03637 5005106273 Plate, Face, Producer, 200mm 0021-07418 5005106131 Standoff, Slotted 0021-09097 5005106083 Liner, Lower, Locator 0021-09703 5005106149 Plate, Blocker, Perforated 0021-10296 5005106185 Manifold, Output 0021-11747 5005106287 Cover, Pedestal 0021-13477 5005701019 Screw 0021-15763 5005106161 Ring, Deposition, 6", SMF/JMF 0021-17875 5005106167 Insert, Valve, Throttle, Sigma 0021-21900 5005106124 Ring, Deposition, Titanium 0021-21900 5005106160 Ring, Deposition, Modified 0021-35087 5005106275 Plate, Blocker, N2, Carrier 0021-37258 5005106147 Plate, Pumping 0021-38119 5005106274 Plate, Face, DXZ, DCVD, Center 0021-38689 5005106148 Showerhead, Plate, Perforated 0021-39385 5005206066 Plate, Lid, SSGD, Chamb, R2 0021-40317 6005300018 Holder, Pin, Lift 0021-77474 P1 5001061895 Ring, Retaining, CMP, 150mm 0030-00198 5005106055 Ring, Pedestal, Lexan, 6" 0030-01037 5005106156 Clip, Wafer, AME 0040-13377 5005106271 Wing, LT, HP, Enhanced 0040-13378 5005106272 Wing, RT, HP, Enhanced 0040-13379 5005106270 Arm, Left, Robot, HP+ 0040-13380 5005106269 Arm, Right, Robot, HP+ 0040-21178 5005106187 Bell Jar, Preclean 2 0040-91727 5005400004 Strap, Electrode, 9200 01-60304-700 5005106138 Pedestal, Conductive 01-83413-00 5005106141 Tray, Hexode 0190-36174 5005101051 Ring, Seal, Aluminum 0190-36614 5005102061 Ring, Seal, Aluminum 0190-70070 5005300003 Bearing, Ball, .312ID, Centura 5300 0190-70076 5005300004 Bearing, Ring, Magnetic, 6" 0190-75080 5005300005 Bearing, Robot, VHP 0200-00012D 5005206006 Ring, Quartz, 5" (5) 0200-00059 5005106143 Cover, Quartz, 6", DF 0200-00303 5005106281 Sapphire Lift Pin 0200-00337 5005106126 Back, Window, Sapphire 0200-00353 5005106239 Spacer, Pin, Ceramic 0200-00410 Rev. 3 5005106171 Uni-Insert, Gas Distribution, 88 holes, Qtz. 0200-00417-P1 5005106168 Ring, Insert, Silicon 0200-00436 5005106169 Ring, Shadow, 150 mm 0200-00464 5005106204 Ring, Lift, Ceramic 0200-00518 5005106194 Ring, Pumping 0200-00576 5005106211 Pin, Weight, 300mm 0200-00622 5005106244 Ring, Outer 0200-00624 5005106243 Ring, Purge, 200mm, WxZ + NCSR