FSI Please contact VTI for module repair, part duplication and custom design services. OEM PN VTI PN DESCRIPTION 231476-001 5039105030 Repair, Servo Drive, Brushless, BRU-200 231484-001R 5039105027 Repair, Power, Supply 232442-001 5039105044 (Repair), Supply, Power, HC 233279-001 5039102000 Sensor, Barometer, Pressure 280271-001 6045000011 Assembly, Spinner, Orginal 280320-001 5039105024 Repair, Controller, Whedco P2000 21/22000 280320-002 5039105024 Repair, Controller, Whedco P25/3500 294106-402 5039105007 Board, Sensor, Exhaust, 0 to 5 300281-001 5039101001 Tie, Nyl Cable 7/8" Dia 300423-001 5039102004 Ferrule, Front, SS .250T (Sw) 300548-001 5039102005 Ferrule, Back, SS .250T (Sw) 300841-015 5039106121 Screw, Nylon, Pan Head, 4-40x1/2" 302698-001 5039106098 Gear 303078-004 5039102006 Nut, SS 1/4T (SW) 306185-001 5039102001 Tubing, PFA, HP 450 1/8"ODx0.30 307868-001 5039106108 Screw, Delrin, Head, Pan, 4-40x1/2 307868-002 5039106107 Screw, Delrin, Head, Pan, 4-40x1 308164-001 5039102003 Conn, Male, Q-Disc, 10-32 VNFx1/8T 308334-001 5039106019 Spinner, Enhanced 410910-001 5039106114 Tube, Exhaust 411471-002 5039105041 Supply, Power, RX90 411984-001 5039106084 End Effector, Locator, 560C, Finger Tip 412148-001 6045000018 Plate, Bake, P21/2200 412711-001 5039106030 Tip, Vespel 414997-001 5039106013 Pin, Proximity 414998-001 5039101011 Spring, Pin, Lift 415581-001 5039106102 Tray, Drain, SP 416230-001 5039106103 Tube, Drain, SP 416770-001 5039106101 Mount, Nozzle, Head, Motor 418838-001 5039106094 Pin, Shear, Effector, End, RX-90 419155-001 5039106117 Weld, Filler, Rinse 420142-001 5039106061 SP, Washer, POU, Mixing ID 420143-001 5039106062 SP, Washer, POU, Mixing OD 420144-001 5039106063 SP, Spacer, POU, Mixing Center 420145-001 5039106064 SP, Spacer, POU, Mixing Inlet 420146-001 5039106065 SP, Spacer, POU, Mixing Outlet 421739-001 5039106012 Cup, Vacuum, Arm, Load 423809-001 5039106026 Bracket, Pressure Sensor 423810-001 5039106027 Mount, Pressure Sensor 424231-001 5039106059 LH Vertical Adjustment SP Bracket 424232-001 5039106058 Bracket, SP, Adjustment, Vertical, RH 425172-001 5039106057 Bracket, SP, Adjustment, Vertical, #4, Bottom 425230-001 5039106056 Mount, SP, Dispense, 4-Tube 427810-001 5039106052 Adjustment, Sensor, Bracket 427811-001 5039106051 Adjustment. Sensor, Screw 428497-001 5039102002 Reducer, Bored 1/8T x1/4MT (SW) 428641-001 5039106028 Tube, SP Drain Acetal 429076-001 5039106053 Adjustment, Sensor, Mount 436737-001 5039106024 Nozzle, UHP, SSM, CT, 3/16x0.130ID 436737-006 5039106034 Nozzle, UHP, SSM, CT, 3/16x0.100ID 436737-011 5039106035 Nozzle, UHP, SSM, CT, 3/16x0.063ID 905834-002 5039106005 Chuck, LCM, 200mm 905834-003 5039106003 Chuck, LCM, 150mm 906253-001 5039105038 Assembly, Cable, SP, Heater, Exchanger, RTD 907937-001 5039106082 Nozzle, EBR, Top 908579-003 5039106067 Assy, Joint, Rotary, RX90A and RX90B 912457-001 5039105008 Board, PC, Effector, End 912467-001 5039105008 Board, PC, Effector, End 914395-001 6045000009 Kit, Standard. Rdl, Dispense, Manip, #4  917508-001 5039105012 Assy, Cable, SSR, I/OJ8, STA, 300mm 917515-001 5039105009 Assy, Cable, Motor, Step, 300mm 918339-001 5039106029 Chuck, LCM, 300mm 9191 86-150 6045000001 Support, Wafer, 150mm (PEEK) 9191 86-150 6045000003 Assy, Support, Wafer, 150mm (PAI) 919186-200 6045000000 Support, Wafer, 200mm 919956-001 5039105010 Assy, Cable, Harn, Throt, EXH, Upper 919962-001 5039105011 Assy, Cable, Harn, Throt, EXH, Lower 920654-150 5039105039 Assy, Cap, Sensor, 150mm 921442-001 5039105013 Assy, Cable, I/O, Sta, Bake, UHP, 300mm 924078-001 5039105015 Assy, Cable, Axis, Theta, SSM 924080-001 5039105014 Assy, Cable, Axis, Theta, Actr, Dsp, SSM 925941-150 6045000003 Assy, Support, Wafer, 150mm 925941-300 6045000002 Support, Wafer, 300mm   5039102009 O-Ring, Kalrez   5039105025 Spinner, Orginal   5039105026 Repair, Power Supply, Switching   5039105029 Repair, Supply, Power   5039106004 Tube, Standoff, Heater, Ceramic   5039106007 Loop, Exhaust   5039106009 Assy, Pin, Proximity   5039106012 Cup, Vacuum, Arm, Load   5039106013 Pin, Proximity, Plate, Heater    5039106014 Pin, Proximity, Plate, Heater (-3MM)   5039106015 Pin, Proximity, Plate, Heater (-6MM)   5039106022 Cup, Vacuum, Arm, Load, PAI, Small   5039106023 Cup, Vacuum, Arm, Load, Large   5039105025 Spinner, Orginal   5039105026 Repair, Power Supply, Switching   5039105029 Repair, Supply, Power   5039106049 Refurbishment, Wrist, Robot, RX-90   5039106075 Tip, Dispense, Qtz, P2000   5039106076 Tip, Dispense, Qtz, P1000   5039106083 Horseshoe, Arm, Radial, P1000   5039106085 Gasket, Kapton   5039106086 Gasket, Kapton, Modified   5039106087 Gasket, Kapton, Modified, Solid   5039106091 Nozzle, Resist, 200mm, P2000   5039106092 Tip, Dispense, Quartz, Nozzle, P2000   5039106093 Stop, Locator, 560C   5039106100 Shield, SP, Front, Half, P2000   5039106112 Box, Drain, Multi-Port   5039106113 Wash, Bowl, 200mm, Special   6045000004 Kit, Bowl Pressure Sense, SP   6045000006 Motor, Spin, Reliance, Rebuild   6045000008 Assembly, Adjustment, Sensor   6045000013 Assy, Cup, Solvent, P2000   6045000020 Assy, Cable, Ribbon, POS, 24, Robot   6045000021 Assy, Cable, Ribbon, POS, 16, Robot   6045000022 Nozzle, Rinse, Side, Back   6045000023 Kit, SP, Upgrade, Drain, Wafer   6045000027 Assy, Bowl, 200mm, Modified