







|
 | LAM
| Please contact VTI for module repair, part duplication and custom design services.
| OEM PN |
VTI PN |
DESCRIPTION |
| 2201679 |
5009106135 |
Screw,
Spring, Stainless Steel |
| 2301700 |
5009106144 |
Tube, Ceramic |
| 2301856 |
5009106140 |
Clamp,
Wafer, Ceramic, 6" |
| 147-20426-00 |
5009106251 |
Ring, Focus, Modified |
| 228-022-0241 |
5009001023 |
10"
Deionizer Catridge |
| 60-00134-00 |
6005100000 |
Assy.,
Clamp, Retainer, &, Plunger |
| 660-007613-001 |
5009105000 |
Supply, Power |
| 660-007614-001 |
5009105001 |
Supply, Power |
| 713-000032-001 |
5009106005 |
Bushing, Large, Delrin |
| 713-000032-001 |
5009176001 |
Bushing, Vespel, Large |
| 713-000032-002 |
5009176000 |
Bushing,
Vespel, Small |
| 713-002870-001 |
5009176025 |
Slit,
Window, End Point, Teflon |
| 713-009531-008 |
5009176046 |
Screw, Kel-F, 6-32 |
| 713-011545-002 |
5009176016 |
Guide,
Spring |
| 713-011546-002 |
5009176018 |
Sleeve, Plunger |
| 713-011574-001 |
5009176052 |
Plunger, Wafer Clamp (A Dim=0.5) |
| 713-011575-001 |
5009176015 |
Nut,
Retainer |
| 713-011577-001 |
5009176009 |
Plunger, Sleeve Guide |
| 713-011578-003 |
5009176023 |
Plunger, Sleeve Guide |
| 713-011579-001 |
5009176022 |
Stem,
Plunger, Spring Guide |
| 713-011584-001 |
5009106011 |
Plunger, KEL-F, Old Style |
| 713-011584-001 |
5009176010 |
Plunger,
Kel-F, New Style |
| 713-011585-004 |
5009106102 |
Insert,
Teflon |
| 713-011592-001 |
5009176007 |
Washer,
Kel-F, O.D., -0.625, I.D. -0.200 |
| 713-011592-002 |
5009176008 |
Washer,
Kel-F, O.D., -0.625, I.D. -0.240 |
| 713-011650-006 |
5009106027 |
Ring, Focus, 6" |
| 713-011926-001 |
5009176034 |
Cap,
Clamp Retaining Bolt |
| 713-011928-001 |
5009176048 |
Cap,
Electrode Retaining Bolt |
| 713-011980-001 |
5009176051 |
Housing,
Plunger, LAM 4520 |
| 713-015186-008 |
5009106245 |
Plate, Match, Fiberglass |
| 713-020911-102 |
5009176035 |
Plunger Cap, Lower Housing, LAM 4520 |
| 713-021267-001 |
5009176054 |
Pin,
Clamp, Alignment, Head |
| 713-021268-001 |
5009176049 |
Pin,
Clamp, Alignment, Base |
| 713-021875-001 |
5009176064 |
Clamp,
Director, Gas, ISO, Lower |
| 713-028485-001 |
5009176061 |
Bolt, Electrode, Ring, Clamp, Kel-F |
| 713-028487-001 |
5009106157 |
Ring,
Confinement, Vespel |
| 713-028553-103 Rev 1 |
5009106223 |
Ring,
Confinement, Vespel |
| 713-028553-103 Rev 1 |
5009106224 |
Ring, Confinement, Ceramic |
| 713-071084-003 |
5009176059 |
Pin, Align, Focus, Ring, ESC |
| 713-090498-002 |
5009106229 |
Bushing, Door, LAM |
| 713-140214-001 |
5009176058 |
Pin,
Align, Focus, Ring, ESC |
| 713-140434-001 |
5009106176 |
Pin,
Index, Ring, Quartz |
| 713-15159-01 |
5009106246 |
Veane, Tune |
| 713-249095-001 Rev 1 |
5009106211 |
Puck, Alignment |
| 713-250585-001 |
5009106149 |
HSG,
Isolator, RF |
| 713-330153-003 |
5009176040 |
Rod,
Adjustable, Clamping, Vespel, 9600 |
| 713-330166-002 |
5009176042 |
Cover,
Rod, Clamping, B.A.C. 9600 |
| 713-330311-001 |
5009176041 |
Clip,
B.A.C. 9600 |
| 713-330701-001 |
5009176069 |
Cone |
| 713-330703-001 Rev A |
5009176067 |
Rod,
Vespel |
| 713-330704-001 |
5009176070 |
HSG, SPR |
| 713-347430-001 |
5009176066 |
Support, Window, DSQ |
| 713-540183-002 |
5009106190 |
Bushing,
Lower, Peek |
| 713-540184-002 |
5009106191 |
Bushing,
Upper, Peek |
| 714-330982-001 |
5009106218 |
Liner,
Chamber |
| 714-412374-001 |
5009106197 |
Tray, Keyboard |
| 715-001147-002 |
5009106060 |
Key,
1/8" Sq. x 0.75" Lg. |
| 715-001147-006 |
5009106061 |
Key,
1/8" Sq. x 3.00" Lg. |
| 715-004154-001 |
5009101005 |
Screw, Ring, Retaining |
| 715-006310-001 |
5009106123 |
Spacer |
| 715-006362-006 |
5009106122 |
Screw, #8, Anodized |
| 715-006436-001 |
5009106008 |
Barrier, Ion, Pll |
| 715-007469-002 |
5009106083 |
Electrode,
Aluminum |
| 715-008282-001 |
5009106110 |
Ring, Clamping |
| 715-008331-001 |
5009001021 |
Filter, Millipore |
| 715-008721-001 |
5009106078 |
Cathode,
Aluminum |
| 715-009161-001 |
6005000044 |
Lifter,
Wafer |
| 715-009306-005 Rev C |
5009126000 |
Ring, Focus, Lower, 4" |
| 715-009306-006 |
5009106076 |
Ring, Focus, 6", Ceramic |
| 715-009306-006 |
5009106077 |
Ring,
Focus, Aluminum, 6" |
| 715-011116-002 |
5009106062 |
Sleeve, Adjust, Nut |
| 715-011125-001 |
5009001001 |
Sprocket, Idler |
| 715-011148-002-A |
6005000004 |
Assy,
Arm, Tensioner, Chain |
| 715-011563-161 |
5009106003 |
Clamp,
Wafer, Domed, Ceramic, 6" |
| 715-011565-001 |
5009106024 |
Bolt,
Clamp, Retaining |
| 715-011565-002 Rev C |
5009106069 |
Screw,
Vent, #10-32, Pasivated, SS |
| 715-011585-001 |
5009176020 |
Cover, Clamp, Bolt |
| 715-011622-101 |
5009106159 |
Lifter,
Wafer, 4 Pin, Flexible |
| 715-011640-001 |
5009106002 |
Ring,
Focus, Lower, Aluminum, Black Anodized |
| 715-011640-001 |
5009106004 |
Ring,
Focus, Lower, Ceramic |
| 715-011746-161 Rev C |
5009106029 |
Clamp,
Wafer, Aluminum, 6" (original) |
| 715-011746-161 Rev C |
5009106036 |
Clamp,
Wafer, Ceramic, 6" |
| 715-011925-001 |
5009106022 |
Bolt,
Retaining, Clamp |
| 715-011927-001 |
5009106023 |
Bolt,
Electrode, Clamp, Ring |
| 715-011982-001 |
5009106132 |
Plunger Cap, Lower Housing, LAM
4520 |
| 715-012233-003 |
5009106216 |
Gate |
| 715-018991-206 |
5009106237 |
Electrode, Aluminum, 6" |
| 715-026182-001 |
5009106145 |
Electrode,
Upper, Aluminum |
| 715-030136-003A |
5009106125 |
Ring,
Edge, ESC, 6" |
| 715-030136-004 |
5009106236 |
Ring, Edge, ESC |
| 715-11116-002 |
5009106062 |
Sleeve, Nut, Adjust |
| 715-140286-001 |
5009106178 |
Ring, Focus, 6" |
| 715-160153-003 |
5009106248 |
Plate, Mounting, Match, DSQ |
| 715-250516-001 Rev 1 |
5009106141 |
Clamp, Upper |
| 715-250588-001 Rev E2 |
5009106142 |
Clamp, Lower |
| 715-250596-001 |
5009106151 |
Clamp,
Upper |
| 715-250599-001 |
5009106146 |
Diffuser,
Upper, Electrode |
| 715-250672-001 Rev A |
5009106137 |
Sleeve, Teflon |
| 715-250717-001 |
5009106147 |
Electrode, Upper, 150mm |
| 715-330152-003 Rev 1 |
5009106104 |
Housing,
Spring, Adjustable |
| 715-330302-001 |
5009106283 |
Seal R, Feed, Gas |
| 715-330312-001 |
5009106105 |
Ring,
Retaining, Clip |
| 715-330394-002 |
5009106221 |
Bracket,
Chamber |
| 715-330406-001 |
5009106284 |
Clip, Retaining, Feed, Gas |
| 715-330706-001 |
5009106250 |
Plate,
End |
| 715-330928-002 |
5009106215 |
Liner, Port, Turbo |
| 715-330981-001 |
5009106214 |
Liner, Window, Endpoint |
| 715-330984-001 |
5009106235 |
Ring, ESC, Gap, Fixed, Injector, Gas, Bottom |
| 715-331211-001 |
5009106167 |
Liner, Chamber, Recoat Aluminum Oxide |
| 715-360197-001 |
5009106170 |
Gasket, VCR, Drilled |
| 715-495022-001 |
5009106219 |
Screw, Vented |
| 715-495022-001 |
5009106220 |
Screw, Non-Vented |
| 716-005124-001 |
5009106153 |
Window,
Quartz, Rear |
| 716-005773-006 |
5009106042 |
Ring, Focus, Electrode |
| 716-006711-001 |
5009106005 |
Electrode,
Quick Change, Graphite |
| 716-006711-001 |
5009106021 |
Cathode, Graphite |
| 716-006721-001 |
5009106001 |
Ring,
Insulator, Ceramic, Large |
| 716-006753-001 |
5009106000 |
Insulator,
Ceramic |
| 716-006753-001 |
5009106038 |
Insulator, Ceramic |
| 716-008854-001 |
5009106222 |
Diffuser,
Disk |
| 716-011009-001 |
5009106150 |
Window,
Quartz |
| 716-011533-001 |
5009106065 |
Window, Quartz, Gap Insulator |
| 716-011563-161 |
5009106143 |
Clamp, Wafer, Domed, 6" |
| 716-011563-162 |
5009106009 |
Clamp,
Domed Ceramic, 6" |
| 716-011570-001 |
5009106030 |
Filler,
Orifice, w/c Ceramic |
| 716-011571-001 |
5009106066 |
Washer,
Turn, 1/4" |
| 716-011571-001 |
5009176021 |
Washer, Ceramic |
| 716-011572-001 |
5009106020 |
Clamp,
Retainer |
| 716-011573-001 |
5009106019 |
Plunger,
Ceramic |
| 716-011573-004 |
5009106064 |
Plunger,
Ceramic |
| 716-011638-006 |
5009106007 |
Ring,
Focus, Ceramic |
| 716-011638-008 |
5009106116 |
Ring,
Focus, Thin |
| 716-011749-006 |
5009106032 |
Ring,
Lower, Electrode |
| 716-011759-016 |
5009106010 |
Ring,
Mounting, Ceramic |
| 716-011922-001 |
5009106072 |
Ring,
Electrode, Ceramic |
| 716-011923-001 |
5009106071 |
Ring,
Plunger, Ceramic |
| 716-011981-001 |
5009106131 |
Plunger,
Clamp Wafer, Lower |
| 716-021873-001 |
5009106241 |
Disc, Director, Gas |
| 716-021874-001 |
5009106240 |
Leg, Director, Gas |
| 716-028123-002 Rev 1 |
5009106091 |
Ring,
Filler, Ceramic |
| 716-028414-015 Rev 1 |
5009106090 |
Ring,
Focus, Ceramic |
| 716-028454-012 |
5009106204 |
Window, Quartz, TCP Top, LAM 9400 |
| 716-028668-262 |
5009106087 |
Wafers,
Clamp, Shadow, 6" |
| 716-028678-261 |
5009106085 |
Wafers,
Clamp, Shadow, 6" |
| 716-028688-261 |
5009106200 |
Clamp, Wafer, Match, Bottom |
| 716-028688-261 |
5009106205 |
Ring,
Equipment |
| 716-028721-262 |
5009106112 |
Wafers,
Clamp, Shadow, 6" |
| 716-028721-281 |
5009106115 |
Clamp,
Shadow, Ceramic, 8" |
| 716-029435-006 |
5009106089 |
Ring,
Electrode, Ceramic |
| 716-030135-001 |
5009106213 |
Ring,
Edge, 8" |
| 716-030136-001 |
5009106158 |
Ring,
Edge, ESC, 6" |
| 716-031052-001 |
5009106152 |
Window, Point, End, Quartz |
| 716-071295-003 |
5009106231 |
Pin, Lift |
| 716-072165-005 |
5009106230 |
Ring, Aperture |
| 716-140141-001 |
5009106238 |
Ring, Hot, Edge, 6", ESC, Deg, 15 |
| 716-140163-261 |
5009106162 |
Ring,
Hot Edge, 15 DEG, ESC, STD, 6" |
| 716-140236-062 |
5009106171 |
Ring,
Confinement, Quartz |
| 716-160255-002 |
5009106067 |
Chamber,
Plasma, Quartz |
| 716-249040-001 Rev A |
5009106119 |
Ring,
Quartz, Undercut, Lip, Split |
| 716-249040-002 Rev A |
5009106120 |
Ring,
Quartz, Lip, Split |
| 716-250080-001 |
5009106169 |
Insulator, Upper, 150MM |
| 716-250972-001 Rev A |
5009106117 |
Pin,
SiC |
| 716-330045-004 |
5009106207 |
Ring,
Focus, 8" |
| 716-330045-261 |
5009106160 |
Ring,
Edge, ESC 6" |
| 716-330061-006 |
5009106070 |
Ring,
Baffel, Ceramic |
| 716-330167-161 |
5009106088 |
Clamp,
Shadow, TCP |
| 716-330167-281 |
5009106079 |
Clamp,
Ring, Bottom, 8" |
| 716-330355-002 |
5009106166 |
Window,
Endpoint, Quartz |
| 716-330504-064 |
5009106113 |
Ring,
Focus, Ceramic |
| 716-330890-001 |
5009106208 |
Ring,
Base, Ceramic |
| 716-330891-002 |
5009106174 |
Window, Quartz, TCP |
| 716-330892-007 |
5009106175 |
Plate, Ceramic |
| 716-331051-002 |
5009106187 |
Ring, Focus |
| 716-331099-001 Rev B |
5009106239 |
Ring, Quartz, Focus Edge, LAM 9400 |
| 716-443083-004 |
5009106181 |
Ring,
Confinement, Top |
| 716-443084-003 |
5009106184 |
Ring,
Confinement, Bottom |
| 716-443086-301 |
5009106180 |
Ring,
H Edge, Si SGL x TALL, H Wall, 8" |
| 716-443090-002 |
5009106228 |
Ring,
Quartz |
| 716-461085-001 |
5009106203 |
Scraper,
SiC |
| 716-540198-001 |
5009106188 |
Window,
Silica, Fused |
| 716-540199-001 |
5009106201 |
Lens,Convex, Silica, Fused |
| 718-443144-006 |
5009106194 |
Screw,
Peek |
| 720-000930-020 |
5009001018 |
Screw, Cap, 6-32 |
| 720-009530-008 |
5009176014 |
Screw,
Kel-F, 1/4 - 20 x 0.5", Lg., FHSL |
| 720-009530-016 |
5009176050 |
Screw,
FHSL, Kel-F, 1/4-20 |
| 720-009531-004 |
5009176019 |
Screw,
#6-32 x 1/4, Kel-F |
| 720-009531-006 |
5009176074 |
Screw, HD, Flat, 6-32 x 0.38,
Kel-F |
| 720-009531-010 |
5009001019 |
Screw, KEL-F, 6-32 x 5/8 |
| 720-009531-010 |
5009176043 |
Screw,
FLT HD, 6-32 Kel-F 5/8" LGTH |
| 720-009531-016 |
5009176013 |
Screw,
Kel-F, #6-32 x 1" Lg. FHSL |
| 720-009532-010 |
5009176071 |
Screw, Flathead, 6-32 x 5/8",
Vespel |
| 720-090943-010 |
5009176036 |
Bolt,
Confinement Ring, Kel F, LAM 4520 |
| 720-092759-016 |
5009106118 |
Screw,
Ring, Confinement, Vespel |
| 720-093814-008 |
5009106244 |
Screw, Cap, 6-32x0.50, Ceramic |
| 720-093814-008 |
5009176063 |
Screw, Vespel, 6-32x0.50 |
| 720-093815-006 |
5009106243 |
Screw, 6-32x0.38, Ceramic |
| 720-093815-006 |
5009176062 |
Screw, Vespel, 6-32x0.38 |
| 720-093867-005 |
5009001017 |
Screw, Set, 9600 |
| 720-094109-012 |
5009176012 |
Screw,
Kel-F, #10-32 x 3/4", Lg., SHCS |
| 720-098325-004 |
5009106252 |
Screw, Flathead, Soc, Titanium, Vented, 8-32 x
1/4 |
| 720-443096-014 |
5009106196 |
Screw,
Nylon |
| 720-443208-010 |
5009106193 |
Screw,
Baffle, Peek |
| 721-093884-006 |
5009106285 |
Washer, Belleville, O.D.,
0.317 |
| 721-250695-001 |
5009106134 |
Washer, 1/4", Stainless Steel |
| 722-000966-002 |
5009001014 |
Nut, Hex, Jam, 1/4-20, S/S |
| 722-009637-001 |
5009176017 |
Nut,
Hex, Kel-F, #10-32 Thru |
| 723-007749-001 |
5009001008 |
Spacer, Shaft, 1/4"OD |
| 726-001046-001 |
5009001012 |
Ring, Retaining |
| 726-250712-001 |
5009106138 |
E-Clip, SS |
| 734-000229-001 |
5009102014 |
O-Ring, Viton |
| 734-000230-001 |
5009102062 |
O-Ring, Viton |
| 734-000663-001 |
5009102003 |
O-Ring, Viton |
| 734-000980-001 |
5009102031 |
O-Ring, Viton |
| 734-001081-001 |
5009102013 |
O-Ring, Viton |
| 734-001169-001 |
5009102065 |
O-Ring, Viton |
| 734-001682-001 |
5009102074 |
O-Ring, Poly |
| 734-001849-001 |
5099202227 |
O-Ring Viton |
| 734-004046-001 |
5009102079 |
O-Ring, Poly |
| 734-004046-001 |
5009106047 |
O-Ring, Idler, Enter, Track |
| 734-004049-001 |
5009102080 |
O-Ring, Poly |
| 734-004049-001 |
5009106048 |
O-Ring, Track, Short |
| 734-004051-001 |
5009102078 |
O-Ring, Poly |
| 734-004051-001 |
5009106049 |
O-Ring, Track, Long |
| 734-004077-001 |
5009102075 |
O-Ring, Poly |
| 734-004077-001 |
5009106045 |
O-Ring, Exit, Track |
| 734-004078-001 |
5009102077 |
O-Ring, Poly |
| 734-004078-001 |
5009106044 |
O-Ring, Motor, Indexer |
| 734-005535-001 |
5009106092 |
O-Ring, Kalrez |
| 734006000-001 |
5009102029 |
O-Ring, Flouro Silicon |
| 734-006000-001 |
5099202228 |
O-Ring, Viton |
| 734-006304-001 |
5009102015 |
O-Ring, Viton |
| 734-006338-001 |
5009102041 |
Seal, Quad, Q4010 |
| 734-006760-001 |
5009102034 |
O-Ring, Viton |
| 734-006762-001 |
5009102005 |
O-Ring, Viton |
| 734-007020-001 |
5009102019 |
O-Ring, Viton |
| 734-007260-001 |
5009102016 |
O-Ring, Viton |
| 734-007292-001 |
5009102022 |
O-Ring, Viton |
| 734-007314-001 |
5009102021 |
O-Ring, Viton |
| 734-007328-001 |
5009102023 |
O-Ring, Viton |
| 734-007329-001 |
5009102011 |
O-Ring, Viton |
| 734-007333-001 |
5009102009 |
O-Ring, Viton |
| 734-007334-001 |
5009102002 |
O-Ring, Viton |
| 734-007334-001 |
5009102010 |
O-Ring, Viton |
| 734-007335-001 |
5009102001 |
O-Ring, Viton |
| 734-007357-001 |
5099202252 |
O-Ring, Viton |
| 734-007358-001 |
5099202248 |
O-Ring, Viton |
| 734-007359-001 |
5009102025 |
Seal, Chamber |
| 734-007359-001 |
5009106093 |
O-Ring, Viton |
| 734-007369-001 |
5009102007 |
O-Ring, Viton |
| 734-007369-001 |
5009102060 |
O-Ring, Quad |
| 734-007460-001 |
5009102012 |
O-Ring, Viton |
| 734-007460-001 |
5009102030 |
O-Ring, ELL Inner/Outer Door |
| 734-007460-001 |
5009106095 |
O-Ring, Viton |
| 734-007460-001 |
5099202204 |
O-Ring, Viton |
| 734-007461-001 |
5099202226 |
O-Ring, Viton |
| 734-007743-001 |
5009102026 |
O-Ring, Viton |
| 734-007744-001 |
5009102024 |
O-Ring, Viton |
| 734-007762-001 |
5009102040 |
Seal, Quad,
Q4445 |
| 734-007912-001 |
5009102000 |
O-Ring, Viton |
| 734-008123-001 |
5009002001 |
O-Ring, Viton |
| 734-008179-001 |
5009102008 |
O-Ring, Viton |
| 734-008546-001 |
5009102006 |
O-Ring, Viton |
| 734-008546-001 |
5009102061 |
O-Ring, Kalrez |
| 734-008771-001 |
5009102027 |
O-Ring, Viton |
| 734-008822-001 |
5009102017 |
O-Ring, Viton |
| 734-008835-001 |
5009102047 |
O-Ring, Viton |
| 734-008835-001 |
5009102050 |
O-Ring, Viton |
| 734-008862-001 |
5009102020 |
O-Ring, Viton |
| 734-008862-001 |
5009102082 |
O-Ring, Viton |
| 734-008863-001 |
5009102018 |
O-Ring, Viton |
| 734-008922-001 |
5009102036 |
O-Ring, Viton |
| 734-008971-001 |
5009102063 |
O-Ring, Viton |
| 734-009013-001 |
5009102004 |
O-Ring, Viton |
| 734-009119-001 |
5009102076 |
O-Ring, Poly |
| 734-009119-001 |
5009106050 |
O-Ring, Lifter |
| 734-009250-001 |
5009102028 |
O-Ring, Viton |
| 734-009767-001 |
5009102032 |
O-Ring, Viton |
| 734-009868-001 |
5009102081 |
O-Ring, Viton |
| 734-009869-001 |
5009102083 |
O-Ring, Viton |
| 734-018491-001 |
5009102084 |
O-Ring, Viton |
| 734-061280-010 |
5099202126 |
O-Ring, Viton |
| 734-061280-109 |
5099202087 |
O-Ring, Line, Gas, Window, TCP |
| 734-061280-281 |
5099202246 |
O-Ring, Viton |
| 734-091193-001 |
5009102049 |
O-Ring, Viton |
| 734-091993-001 |
5009102037 |
O-Ring, Silicon |
| 734-091993-001 |
5009102052 |
O-Ring, Flouro Silicon, Window, Quartz |
| 734-091993-001 |
5009106098 |
O-Ring, Flouro Silicon |
| 734-091994-001 |
5009102033 |
O-Ring, Flouro Silicon, Cover, PLL |
| 734-091994-001 |
5009106101 |
O-Ring, Flouro Silicon |
| 734-091995-001 |
5009106096 |
O-Ring, Flouro Silicon |
| 734092038-001 |
5009102055 |
O-Ring, Flouro Silicon, Ring, Gas, Outer, DSQ |
| 734-092038-001 |
5009102038 |
O-Ring, Silicon |
| 734-092038-001 |
5009106099 |
O-Ring, Flouro Silicon |
| 734-092040-001 |
5009102054 |
O-Ring, Flouro Silicon, Door, Outer, DSQ |
| 734-092040-001 |
5009102088 |
O-Ring, Flouro Silicon, Door, Inner, DSQ |
| 734-092040-001 |
5009106100 |
O-Ring, Flouro Silicon |
| 734-092040-001 |
5099202088 |
O-Ring, Flouro Silicon, Door, Inner, DSQ |
| 734-092041-001 |
5009102048 |
O-Ring, Silicon |
| 734-092041-001 |
5009102051 |
O-Ring, Flouro Silicon, Spacer, Quartz |
| 734-092041-001 |
5009106097 |
O-Ring, Flouro Silicon |
| 734-092107-001 |
5009102086 |
O-Ring, Seal |
| 734-092561-278 |
5099202251 |
O-Ring, FSI |
| 734-093789-001 |
5009106094 |
Seal, O-Ring, Gate, Chamber |
| 739-000421-001 |
5009102072 |
Seal, .750 |
| 739-000422-001 |
5009102043 |
Seal, Teflon |
| 739-000422-001 |
5009102071 |
Seal, .250 |
| 739-000983-001 |
5009102044 |
Seal, Teflon |
| 739-000983-001 |
5009102069 |
Seal, Teflon, Small |
| 739-000984-001 |
5009102046 |
Seal, Teflon |
| 739-000984-001 |
5009102068 |
Seal, Teflon, Large |
| 739-000985-001 |
5009102045 |
Seal, Teflon |
| 739-000985-001 |
5009102070 |
Seal, Teflon, Medium |
| 739-007783-001 |
5009002002 |
Seal, Quad,
Q4454 |
| 739-090783-001 |
5009106189 |
Contact, Strip, Copper |
| 746-001125-001 |
5009101004 |
Bearing, Thrust, 1/4" ID |
| 746-007608-001 |
5009101003 |
Washer, Thrust, .25" x .060" |
| 746-007652-001 |
5009001004 |
Bearing, 15M, Cont, Angle, Row, Double |
| 746-090156-001 |
5009001011 |
Bearing, Flanged, Shielded, Double |
| 750-001127-001 |
5009001009 |
Chain, Roller, Link #25, Offset |
| 750-002176-001 |
5009001007 |
kit, Master-Link #25 |
| 750-007781-001 |
5009001006 |
Chain, Roller, 52.00", SST, #25 |
| 750-007782-001 |
5009001010 |
Chain, Roller #35, 15.75" Lg. |
| 750-090192-001 |
5009001002 |
Link, Master, SST, #35 |
| 752-000224-008 |
5009106107 |
Pin, Roll, 3/32 x 1/2 Lg. |
| 752-000236-001 |
5009106108 |
Pin, Roll, 1/8 x 3/4 |
| 752-002045-005 |
5009106109 |
Pin, Roll, 1/16 x 3/8 |
| 752-007513-001 |
5009101006 |
Key, 3/32x0.60 |
| 754-007751-001 |
5009001015 |
Spring, Tensioner, SS |
| 754-009002-015 |
5009101009 |
Spring, Compression, SST |
| 754-009002-015 |
5009101009 |
Spring, Plunger, Assy, 30 lbs. |
| 754-090359-015 |
5009101010 |
Spring, Compression, SST |
| 754-090457-014 |
5009101008 |
Spring, Clamp, Retaining |
| 754-091624-001 |
5009101007 |
Spring, Lower Plunger, LAM 4520 |
| 754-092082-002 |
5009001024 |
Bearing, Guide, w/Spring, Leaf |
| 754-093243-006 |
5009001016 |
Spring, Cprsv, Wire, 9600 |
| 754-093243-006 Rev 1 |
5009001016 |
Spring, Assembly, Plunger, 9600 |
| 754-250529-001 |
5009106136 |
Spring, Screw, Shoulder |
| 756-007809-010 |
5009001013 |
Screw, Schd, Shldr, 10-32 |
| 765-007786-001 |
5009001003 |
Sprocket, Driven, 1.214 Pd |
| 766-008456-001 |
5009002000 |
Valve, Air |
| 790-006301-001 |
5009176055 |
Lifter,
Chamber, Back-up |
| 790-008882-195 |
5009102066 |
Belt, Drive, Harmonic, XLL, Small |
| 790-008882-205 |
5009102067 |
Belt, Drive, Harmonic, XLL, Large |
| 790-092080-002 |
5009001022 |
Bearing, Lock, Over |
| 790-092081-001 |
5009102087 |
Bolt, Crank |
| 795-250729-001 |
5009106148 |
Lens,Convex |
| 796-002672-001 |
5009102058 |
Gasket, Nupro |
| 796-002673-001 |
5009102059 |
Stem, Nupro |
| 796-002673-001 |
5009102064 |
Tip, Nupro |
| 796-028633-010 |
5009126003 |
Screw, AL, Plate, Baffle |
| 796-093622-001 |
5009106168 |
Gate |
| 796-098648-001 |
5099202249 |
O-Ring, Seal, Gate |
| 839-003958-001 |
5009106124 |
Diffuser,
LL |
| 839-012255-001 |
5009106255 |
Bellows, Gate, Inner |
| 839-012255-001 |
5009106256 |
Repair, Bellows, Gate, Inner |
| 839-031766-001 |
5009106279 |
Bellows, Lifter |
| 839-140210-001 |
5009106186 |
Cover, ESC |
| 720-090685-010 |
5009106290 |
Screw, Flathead, 4-40 x .63" Teflon |
| 839-249094-001Rev A |
6005000043 |
Housing,
Pin, SiC |
| 839-249332-001Rev E1 |
6005000032 |
Housing,
Pin, SiC, SS |
| 839-330303-001 |
5009106282 |
Weldment, Elbow, Fitting, Gas, Gap,
Fixed |
| 839-470315-001 |
5009126006 |
Cap, Gas |
| 852-011060-001 |
6005000008 |
Kit, Gap |
| 852-011060-xxx |
6150000009 |
Kit, Sub-Assy, PM, Motor, RF, Gap |
| 852-011061-001 |
6150000016 |
Kit, Sub-Assy, PM, Housing,Chamber, Electrode,
Lower |
| 852-011061-001 |
6150000018 |
Kit, Sub-Assy., PM, Housing, Chamber, Lower |
| 852-012525-001 |
6150000020 |
Kit, Sub-Assy., PM, Spinner, Lifter |
| 853-011555-001 |
6150000010 |
Kit, Sub-Assy, PM, Electrode, Upper |
| 853-012100-003 |
6150000008 |
Kit, Sub-Assy, PM, Housing, Arm |
| 853-012123-001 |
6150000012 |
Kit, Sub-Assy, PM, Housing, Chamber, Upper,
Oxide |
| 853-012200-002 |
6150000007 |
Kit, Sub-Assy, PM, Gate |
| 853-250784-001-1 |
5009106212 |
Puck, Alignment |
| 853-330721-001 |
6005000064 |
Assy, ACTR, JD, BAC |
| 853-347413-006 |
5009106293 |
Rework, Paddle, Heater |
| 853-347413-008 |
5009106301 |
Rework, Paddle, Heater, 200mm |
| 853-441511-001 Rev 1 |
5009126005 |
Plate, Cap, Gas |
| 857-010229-001 |
6005000010 |
Puck,
Alignment |
| 860-010113-001 |
6150000017 |
Kit, Sub-Assy, PM, Housing, Loadlock, Exit |
| |
5009001000 |
Sprocket, Driven, 2.873 Pd |
| |
5009100000 |
Clamp, Plunger & Retainer, Ceramic (4420) |
| |
5009106114 |
Window, Block, Sapphire |
| |
5009106121 |
Sleeve, Plunger, KEL-F |
| |
5009106133 |
Ring,
Clamp, Aluminum |
| |
5009106155 |
Cover, APM |
| |
5009106161 |
Fence, Cassette |
| |
5009106185 |
Cover, Chamber |
| |
5009106199 |
Coupler, Match |
| |
5009106217 |
Plate, Pendulum |
| |
5009106232 |
Window, Quartz, DXQ |
| |
5009106247 |
Rod, Lexan |
| |
5009106059 |
Arm,
Tensioner, Chain, Pin |
| |
5009106058 |
Arm,
Tensioner, Chain |
| |
5009176004 |
Bushing, Small, Delrin |
| |
5009176056 |
Gasket, Teflon |
| |
5009176057 |
Spacer |
| |
6005000003 |
Kit, Plunger Assembly, Kel-F |
| |
6005000009 |
Kit, Plunger, Ceramic |
| |
6005000010 |
Assy,
Puck, Alignment, 0.30" |
| |
6005000011 |
Assy,
Puck, Alignment, 1.1" |
| |
6005000015 |
Kit, PM, Wet, DSQ, 9600 |
| |
6005000016 |
Kit,
PM, Plunger, 9600 |
| |
6005000019 |
Kit, Clean, Chamber, 9600 |
| |
6005000020 |
Kit, PM, A, Level |
| |
6005000021 |
Kit, PM, B, Level |
| |
6005000022 |
Kit, PM, C, Level |
| |
6005000023 |
Kit, PM, D, Level |
| |
6005000030 |
Kit, PM, 490/590 |
| |
6005000031 |
Kit, Plunger, Long |
| |
6005000047 |
Kit, PM, Rainbow, model 4528 |
| |
6005000048 |
Kit, Plunger |
| |
6005000054 |
Kit, PM, Chamber, Main, 9600 |
| |
6005000057 |
Kit, PM, Plunger, 4500 |
| |
6005000059 |
Kit, Cap, Bolt, Retaining,
Clamp |
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