LAM Please contact VTI for module repair, part duplication and custom design services. OEM PN VTI PN DESCRIPTION 2201679 5009106135 Screw, Spring, Stainless Steel 2301700 5009106144 Tube, Ceramic 2301856 5009106140 Clamp, Wafer, Ceramic, 6" 147-20426-00 5009106251 Ring, Focus, Modified 228-022-0241 5009001023 10" Deionizer Catridge  60-00134-00 6005100000 Assy., Clamp, Retainer, &, Plunger  660-007613-001 5009105000 Supply, Power 660-007614-001 5009105001 Supply, Power 713-000032-001 5009106005 Bushing, Large, Delrin 713-000032-001 5009176001 Bushing, Vespel, Large 713-000032-002 5009176000 Bushing, Vespel, Small 713-002870-001 5009176025 Slit, Window, End Point, Teflon 713-009531-008 5009176046 Screw, Kel-F, 6-32 713-011545-002 5009176016 Guide, Spring 713-011546-002 5009176018 Sleeve, Plunger 713-011574-001 5009176052 Plunger, Wafer Clamp (A Dim=0.5) 713-011575-001 5009176015 Nut, Retainer 713-011577-001 5009176009 Plunger, Sleeve Guide 713-011578-003 5009176023 Plunger, Sleeve Guide 713-011579-001 5009176022 Stem, Plunger, Spring Guide 713-011584-001 5009106011 Plunger, KEL-F, Old Style 713-011584-001 5009176010 Plunger, Kel-F, New Style 713-011585-004 5009106102 Insert, Teflon 713-011592-001 5009176007 Washer, Kel-F, O.D., -0.625, I.D. -0.200 713-011592-002 5009176008 Washer, Kel-F, O.D., -0.625, I.D. -0.240 713-011650-006 5009106027 Ring, Focus, 6" 713-011926-001 5009176034 Cap, Clamp Retaining Bolt 713-011928-001 5009176048 Cap, Electrode Retaining Bolt 713-011980-001 5009176051 Housing, Plunger, LAM 4520 713-015186-008 5009106245 Plate, Match, Fiberglass 713-020911-102 5009176035 Plunger Cap, Lower Housing, LAM 4520 713-021267-001 5009176054 Pin, Clamp, Alignment, Head 713-021268-001 5009176049 Pin, Clamp, Alignment, Base 713-021875-001 5009176064 Clamp, Director, Gas, ISO, Lower  713-028485-001 5009176061 Bolt, Electrode, Ring, Clamp, Kel-F 713-028487-001 5009106157 Ring, Confinement, Vespel 713-028553-103 Rev 1 5009106223 Ring, Confinement, Vespel 713-028553-103 Rev 1 5009106224 Ring, Confinement, Ceramic 713-071084-003 5009176059 Pin, Align, Focus, Ring, ESC 713-090498-002 5009106229 Bushing, Door, LAM 713-140214-001 5009176058 Pin, Align, Focus, Ring, ESC 713-140434-001 5009106176 Pin, Index, Ring, Quartz 713-15159-01 5009106246 Veane, Tune 713-249095-001 Rev 1 5009106211 Puck, Alignment 713-250585-001 5009106149 HSG, Isolator, RF 713-330153-003 5009176040 Rod, Adjustable, Clamping, Vespel, 9600 713-330166-002 5009176042 Cover, Rod, Clamping, B.A.C. 9600 713-330311-001 5009176041 Clip, B.A.C. 9600 713-330701-001 5009176069 Cone 713-330703-001 Rev A 5009176067 Rod, Vespel 713-330704-001 5009176070 HSG, SPR 713-347430-001 5009176066 Support, Window, DSQ 713-540183-002 5009106190 Bushing, Lower, Peek 713-540184-002 5009106191 Bushing, Upper, Peek 714-330982-001 5009106218 Liner, Chamber  714-412374-001 5009106197 Tray, Keyboard 715-001147-002 5009106060 Key, 1/8" Sq. x 0.75" Lg. 715-001147-006 5009106061 Key, 1/8" Sq. x 3.00" Lg. 715-004154-001 5009101005 Screw, Ring, Retaining 715-006310-001 5009106123 Spacer        715-006362-006 5009106122 Screw, #8, Anodized 715-006436-001 5009106008 Barrier, Ion, Pll 715-007469-002 5009106083 Electrode, Aluminum  715-008282-001 5009106110 Ring, Clamping 715-008331-001 5009001021 Filter, Millipore 715-008721-001 5009106078 Cathode, Aluminum 715-009161-001 6005000044 Lifter, Wafer 715-009306-005 Rev C 5009126000 Ring, Focus, Lower, 4" 715-009306-006 5009106076 Ring, Focus, 6", Ceramic 715-009306-006 5009106077 Ring, Focus, Aluminum, 6" 715-011116-002 5009106062 Sleeve, Adjust, Nut 715-011125-001 5009001001 Sprocket, Idler 715-011148-002-A 6005000004 Assy, Arm, Tensioner, Chain 715-011563-161 5009106003 Clamp, Wafer, Domed, Ceramic, 6" 715-011565-001 5009106024 Bolt, Clamp, Retaining 715-011565-002 Rev C 5009106069 Screw, Vent, #10-32, Pasivated, SS 715-011585-001 5009176020 Cover, Clamp, Bolt 715-011622-101 5009106159 Lifter, Wafer, 4 Pin, Flexible 715-011640-001 5009106002 Ring, Focus, Lower, Aluminum, Black Anodized 715-011640-001 5009106004 Ring, Focus, Lower, Ceramic 715-011746-161 Rev C 5009106029 Clamp, Wafer, Aluminum, 6" (original) 715-011746-161 Rev C 5009106036 Clamp, Wafer, Ceramic, 6" 715-011925-001 5009106022 Bolt, Retaining, Clamp 715-011927-001 5009106023 Bolt, Electrode, Clamp, Ring 715-011982-001 5009106132 Plunger Cap, Lower Housing, LAM 4520 715-012233-003 5009106216 Gate 715-018991-206 5009106237 Electrode, Aluminum, 6" 715-026182-001 5009106145 Electrode, Upper, Aluminum 715-030136-003A 5009106125 Ring, Edge, ESC, 6" 715-030136-004 5009106236 Ring, Edge, ESC 715-140286-001 5009106178 Ring, Focus, 6" 715-160153-003 5009106248 Plate, Mounting, Match, DSQ 715-250516-001 Rev 1 5009106141 Clamp, Upper 715-250588-001 Rev E2 5009106142 Clamp, Lower 715-250596-001 5009106151 Clamp, Upper 715-250599-001 5009106146 Diffuser, Upper, Electrode 715-250672-001 Rev A 5009106137 Sleeve, Teflon 715-250717-001 5009106147 Electrode, Upper, 150mm 715-330152-003 Rev 1 5009106104 Housing, Spring, Adjustable 715-330302-001 5009106283 Seal R, Feed, Gas 715-330312-001 5009106105 Ring, Retaining, Clip 715-330394-002 5009106221 Bracket, Chamber 715-330406-001 5009106284 Clip, Retaining, Feed, Gas 715-330706-001 5009106250 Plate, End 715-330928-002 5009106215 Liner, Port, Turbo 715-330981-001 5009106214 Liner, Window, Endpoint 715-330984-001 5009106235 Ring, ESC, Gap, Fixed, Injector, Gas, Bottom 715-331211-001 5009106167 Liner, Chamber, Recoat Aluminum Oxide 715-360197-001 5009106170 Gasket, VCR, Drilled 715-495022-001 5009106219 Screw, Vented 715-495022-001 5009106220 Screw, Non-Vented 716-005124-001 5009106153 Window, Quartz, Rear  716-005773-006 5009106042 Ring, Focus, Electrode 716-006711-001 5009106005 Electrode, Quick Change, Graphite 716-006711-001 5009106021 Cathode, Graphite 716-006721-001 5009106001 Ring, Insulator, Ceramic, Large  716-006753-001 5009106000 Insulator, Ceramic 716-006753-001 5009106038 Insulator, Ceramic 716-008854-001 5009106222 Diffuser, Disk 716-011009-001 5009106150 Window, Quartz 716-011533-001 5009106065 Window, Quartz, Gap Insulator 716-011563-161 5009106143 Clamp, Wafer, Domed, 6" 716-011563-162 5009106009 Clamp, Domed Ceramic, 6" 716-011570-001 5009106030 Filler, Orifice, w/c Ceramic 716-011571-001 5009106066