LAM

Please contact VTI for module repair, part duplication and custom design services.

OEM PN VTI PN DESCRIPTION
2201679 5009106135 Screw, Spring, Stainless Steel
2301700 5009106144 Tube, Ceramic
2301856 5009106140 Clamp, Wafer, Ceramic, 6"
147-20426-00 5009106251 Ring, Focus, Modified
228-022-0241 5009001023 10" Deionizer Catridge 
60-00134-00 6005100000 Assy., Clamp, Retainer, &, Plunger 
660-007613-001 5009105000 Supply, Power
660-007614-001 5009105001 Supply, Power
713-000032-001 5009106005 Bushing, Large, Delrin
713-000032-001 5009176001 Bushing, Vespel, Large
713-000032-002 5009176000 Bushing, Vespel, Small
713-002870-001 5009176025 Slit, Window, End Point, Teflon
713-009531-008 5009176046 Screw, Kel-F, 6-32
713-011545-002 5009176016 Guide, Spring
713-011546-002 5009176018 Sleeve, Plunger
713-011574-001 5009176052 Plunger, Wafer Clamp (A Dim=0.5)
713-011575-001 5009176015 Nut, Retainer
713-011577-001 5009176009 Plunger, Sleeve Guide
713-011578-003 5009176023 Plunger, Sleeve Guide
713-011579-001 5009176022 Stem, Plunger, Spring Guide
713-011584-001 5009106011 Plunger, KEL-F, Old Style
713-011584-001 5009176010 Plunger, Kel-F, New Style
713-011585-004 5009106102 Insert, Teflon
713-011592-001 5009176007 Washer, Kel-F, O.D., -0.625, I.D. -0.200
713-011592-002 5009176008 Washer, Kel-F, O.D., -0.625, I.D. -0.240
713-011650-006 5009106027 Ring, Focus, 6"
713-011926-001 5009176034 Cap, Clamp Retaining Bolt
713-011928-001 5009176048 Cap, Electrode Retaining Bolt
713-011980-001 5009176051 Housing, Plunger, LAM 4520
713-015186-008 5009106245 Plate, Match, Fiberglass
713-020911-102 5009176035 Plunger Cap, Lower Housing, LAM 4520
713-021267-001 5009176054 Pin, Clamp, Alignment, Head
713-021268-001 5009176049 Pin, Clamp, Alignment, Base
713-021875-001 5009176064 Clamp, Director, Gas, ISO, Lower 
713-028485-001 5009176061 Bolt, Electrode, Ring, Clamp, Kel-F
713-028487-001 5009106157 Ring, Confinement, Vespel
713-028553-103 Rev 1 5009106223 Ring, Confinement, Vespel
713-028553-103 Rev 1 5009106224 Ring, Confinement, Ceramic
713-071084-003 5009176059 Pin, Align, Focus, Ring, ESC
713-090498-002 5009106229 Bushing, Door, LAM
713-140214-001 5009176058 Pin, Align, Focus, Ring, ESC
713-140434-001 5009106176 Pin, Index, Ring, Quartz
713-15159-01 5009106246 Veane, Tune
713-249095-001 Rev 1 5009106211 Puck, Alignment
713-250585-001 5009106149 HSG, Isolator, RF
713-330153-003 5009176040 Rod, Adjustable, Clamping, Vespel, 9600
713-330166-002 5009176042 Cover, Rod, Clamping, B.A.C. 9600
713-330311-001 5009176041 Clip, B.A.C. 9600
713-330701-001 5009176069 Cone
713-330703-001 Rev A 5009176067 Rod, Vespel
713-330704-001 5009176070 HSG, SPR
713-347430-001 5009176066 Support, Window, DSQ
713-540183-002 5009106190 Bushing, Lower, Peek
713-540184-002 5009106191 Bushing, Upper, Peek
714-330982-001 5009106218 Liner, Chamber 
714-412374-001 5009106197 Tray, Keyboard
715-001147-002 5009106060 Key, 1/8" Sq. x 0.75" Lg.
715-001147-006 5009106061 Key, 1/8" Sq. x 3.00" Lg.
715-004154-001 5009101005 Screw, Ring, Retaining
715-006310-001 5009106123 Spacer       
715-006362-006 5009106122 Screw, #8, Anodized
715-006436-001 5009106008 Barrier, Ion, Pll
715-007469-002 5009106083 Electrode, Aluminum 
715-008282-001 5009106110 Ring, Clamping
715-008331-001 5009001021 Filter, Millipore
715-008721-001 5009106078 Cathode, Aluminum
715-009161-001 6005000044 Lifter, Wafer
715-009306-005 Rev C 5009126000 Ring, Focus, Lower, 4"
715-009306-006 5009106076 Ring, Focus, 6", Ceramic
715-009306-006 5009106077 Ring, Focus, Aluminum, 6"
715-011116-002 5009106062 Sleeve, Adjust, Nut
715-011125-001 5009001001 Sprocket, Idler
715-011148-002-A 6005000004 Assy, Arm, Tensioner, Chain
715-011563-161 5009106003 Clamp, Wafer, Domed, Ceramic, 6"
715-011565-001 5009106024 Bolt, Clamp, Retaining
715-011565-002 Rev C 5009106069 Screw, Vent, #10-32, Pasivated, SS
715-011585-001 5009176020 Cover, Clamp, Bolt
715-011622-101 5009106159 Lifter, Wafer, 4 Pin, Flexible
715-011640-001 5009106002 Ring, Focus, Lower, Aluminum, Black Anodized
715-011640-001 5009106004 Ring, Focus, Lower, Ceramic
715-011746-161 Rev C 5009106029 Clamp, Wafer, Aluminum, 6" (original)
715-011746-161 Rev C 5009106036 Clamp, Wafer, Ceramic, 6"
715-011925-001 5009106022 Bolt, Retaining, Clamp
715-011927-001 5009106023 Bolt, Electrode, Clamp, Ring
715-011982-001 5009106132 Plunger Cap, Lower Housing, LAM 4520
715-012233-003 5009106216 Gate
715-018991-206 5009106237 Electrode, Aluminum, 6"
715-026182-001 5009106145 Electrode, Upper, Aluminum
715-030136-003A 5009106125 Ring, Edge, ESC, 6"
715-030136-004 5009106236 Ring, Edge, ESC
715-11116-002 5009106062 Sleeve, Nut, Adjust
715-140286-001 5009106178 Ring, Focus, 6"
715-160153-003 5009106248 Plate, Mounting, Match, DSQ
715-250516-001 Rev 1 5009106141 Clamp, Upper
715-250588-001 Rev E2 5009106142 Clamp, Lower
715-250596-001 5009106151 Clamp, Upper
715-250599-001 5009106146 Diffuser, Upper, Electrode
715-250672-001 Rev A 5009106137 Sleeve, Teflon
715-250717-001 5009106147 Electrode, Upper, 150mm
715-330152-003 Rev 1 5009106104 Housing, Spring, Adjustable
715-330302-001 5009106283 Seal R, Feed, Gas
715-330312-001 5009106105 Ring, Retaining, Clip
715-330394-002 5009106221 Bracket, Chamber
715-330406-001 5009106284 Clip, Retaining, Feed, Gas
715-330706-001 5009106250 Plate, End
715-330928-002 5009106215 Liner, Port, Turbo
715-330981-001 5009106214 Liner, Window, Endpoint
715-330984-001 5009106235 Ring, ESC, Gap, Fixed, Injector, Gas, Bottom
715-331211-001 5009106167 Liner, Chamber, Recoat Aluminum Oxide
715-360197-001 5009106170 Gasket, VCR, Drilled
715-495022-001 5009106219 Screw, Vented
715-495022-001 5009106220 Screw, Non-Vented
716-005124-001 5009106153 Window, Quartz, Rear 
716-005773-006 5009106042 Ring, Focus, Electrode
716-006711-001 5009106005 Electrode, Quick Change, Graphite
716-006711-001 5009106021 Cathode, Graphite
716-006721-001 5009106001 Ring, Insulator, Ceramic, Large 
716-006753-001 5009106000 Insulator, Ceramic
716-006753-001 5009106038 Insulator, Ceramic
716-008854-001 5009106222 Diffuser, Disk
716-011009-001 5009106150 Window, Quartz
716-011533-001 5009106065 Window, Quartz, Gap Insulator
716-011563-161 5009106143 Clamp, Wafer, Domed, 6"
716-011563-162 5009106009 Clamp, Domed Ceramic, 6"
716-011570-001 5009106030 Filler, Orifice, w/c Ceramic
716-011571-001 5009106066 Washer, Turn, 1/4"
716-011571-001 5009176021 Washer, Ceramic
716-011572-001 5009106020 Clamp, Retainer
716-011573-001 5009106019 Plunger, Ceramic  
716-011573-004 5009106064 Plunger, Ceramic
716-011638-006 5009106007 Ring, Focus, Ceramic 
716-011638-008 5009106116 Ring, Focus, Thin
716-011749-006 5009106032 Ring, Lower, Electrode
716-011759-016 5009106010 Ring, Mounting, Ceramic
716-011922-001 5009106072 Ring, Electrode, Ceramic
716-011923-001 5009106071 Ring, Plunger, Ceramic
716-011981-001 5009106131 Plunger, Clamp Wafer, Lower
716-021873-001 5009106241 Disc, Director, Gas
716-021874-001 5009106240 Leg, Director, Gas
716-028123-002 Rev 1 5009106091 Ring, Filler, Ceramic
716-028414-015 Rev 1 5009106090 Ring, Focus, Ceramic
716-028454-012 5009106204 Window, Quartz, TCP Top, LAM 9400
716-028668-262 5009106087 Wafers, Clamp, Shadow, 6" 
716-028678-261 5009106085 Wafers, Clamp, Shadow, 6" 
716-028688-261 5009106200 Clamp, Wafer, Match, Bottom
716-028688-261 5009106205 Ring, Equipment
716-028721-262 5009106112 Wafers, Clamp, Shadow, 6" 
716-028721-281 5009106115 Clamp, Shadow, Ceramic, 8"
716-029435-006 5009106089 Ring, Electrode, Ceramic
716-030135-001 5009106213 Ring, Edge, 8"
716-030136-001 5009106158 Ring, Edge, ESC, 6"
716-031052-001 5009106152 Window, Point, End, Quartz
716-071295-003 5009106231 Pin, Lift
716-072165-005 5009106230 Ring, Aperture
716-140141-001 5009106238 Ring, Hot, Edge, 6", ESC, Deg, 15
716-140163-261 5009106162 Ring, Hot Edge, 15 DEG, ESC, STD, 6"
716-140236-062 5009106171 Ring, Confinement, Quartz
716-160255-002 5009106067 Chamber, Plasma, Quartz
716-249040-001 Rev A 5009106119 Ring, Quartz, Undercut, Lip, Split
716-249040-002 Rev A 5009106120 Ring, Quartz, Lip, Split
716-250080-001 5009106169 Insulator, Upper, 150MM
716-250972-001 Rev A 5009106117 Pin, SiC
716-330045-004 5009106207 Ring, Focus, 8"
716-330045-261 5009106160 Ring, Edge, ESC 6"
716-330061-006 5009106070 Ring, Baffel, Ceramic
716-330167-161 5009106088 Clamp, Shadow, TCP
716-330167-281 5009106079 Clamp, Ring, Bottom, 8"
716-330355-002 5009106166 Window, Endpoint, Quartz
716-330504-064 5009106113 Ring, Focus, Ceramic
716-330890-001 5009106208 Ring, Base, Ceramic
716-330891-002 5009106174 Window, Quartz, TCP
716-330892-007 5009106175 Plate, Ceramic
716-331051-002 5009106187 Ring, Focus
716-331099-001 Rev B 5009106239 Ring, Quartz, Focus Edge, LAM 9400
716-443083-004 5009106181 Ring, Confinement, Top
716-443084-003 5009106184 Ring, Confinement, Bottom
716-443086-301 5009106180 Ring, H Edge, Si SGL x TALL, H Wall, 8"
716-443090-002 5009106228 Ring, Quartz
716-461085-001 5009106203 Scraper, SiC
716-540198-001 5009106188 Window, Silica, Fused
716-540199-001 5009106201 Lens,Convex, Silica, Fused
718-443144-006 5009106194 Screw, Peek
720-000930-020 5009001018 Screw, Cap, 6-32
720-009530-008 5009176014 Screw, Kel-F, 1/4 - 20 x 0.5", Lg., FHSL
720-009530-016 5009176050 Screw, FHSL, Kel-F, 1/4-20
720-009531-004 5009176019 Screw, #6-32 x 1/4, Kel-F
720-009531-006 5009176074 Screw, HD, Flat, 6-32 x 0.38, Kel-F
720-009531-010 5009001019 Screw, KEL-F, 6-32 x 5/8
720-009531-010 5009176043 Screw, FLT HD, 6-32 Kel-F 5/8" LGTH
720-009531-016 5009176013 Screw, Kel-F, #6-32 x 1" Lg. FHSL
720-009532-010 5009176071 Screw, Flathead, 6-32 x 5/8", Vespel
720-090943-010 5009176036 Bolt, Confinement Ring, Kel F, LAM 4520
720-092759-016 5009106118 Screw, Ring, Confinement, Vespel
720-093814-008 5009106244 Screw, Cap, 6-32x0.50, Ceramic
720-093814-008 5009176063 Screw, Vespel, 6-32x0.50
720-093815-006 5009106243 Screw, 6-32x0.38, Ceramic
720-093815-006 5009176062 Screw, Vespel, 6-32x0.38
720-093867-005 5009001017 Screw, Set, 9600
720-094109-012 5009176012 Screw, Kel-F, #10-32 x 3/4", Lg., SHCS
720-098325-004 5009106252 Screw, Flathead, Soc, Titanium, Vented, 8-32 x 1/4
720-443096-014 5009106196 Screw, Nylon
720-443208-010 5009106193 Screw, Baffle, Peek
721-093884-006 5009106285 Washer, Belleville, O.D., 0.317
721-250695-001 5009106134 Washer, 1/4", Stainless Steel
722-000966-002 5009001014 Nut, Hex, Jam, 1/4-20, S/S
722-009637-001 5009176017 Nut, Hex, Kel-F, #10-32 Thru
723-007749-001 5009001008 Spacer, Shaft, 1/4"OD
726-001046-001 5009001012 Ring, Retaining
726-250712-001 5009106138 E-Clip, SS
734-000229-001 5009102014 O-Ring, Viton
734-000230-001 5009102062 O-Ring, Viton
734-000663-001 5009102003 O-Ring, Viton
734-000980-001 5009102031 O-Ring, Viton
734-001081-001 5009102013 O-Ring, Viton
734-001169-001 5009102065 O-Ring, Viton
734-001682-001 5009102074 O-Ring, Poly
734-001849-001 5099202227 O-Ring Viton
734-004046-001 5009102079 O-Ring, Poly
734-004046-001 5009106047 O-Ring, Idler, Enter, Track
734-004049-001 5009102080 O-Ring, Poly
734-004049-001 5009106048 O-Ring, Track, Short
734-004051-001 5009102078 O-Ring, Poly
734-004051-001 5009106049 O-Ring, Track, Long
734-004077-001 5009102075 O-Ring, Poly
734-004077-001 5009106045 O-Ring, Exit, Track
734-004078-001 5009102077 O-Ring, Poly
734-004078-001 5009106044 O-Ring, Motor, Indexer
734-005535-001 5009106092 O-Ring, Kalrez
734006000-001 5009102029 O-Ring, Flouro Silicon
734-006000-001 5099202228 O-Ring, Viton
734-006304-001 5009102015 O-Ring, Viton
734-006338-001 5009102041 Seal, Quad, Q4010
734-006760-001 5009102034 O-Ring, Viton
734-006762-001 5009102005 O-Ring, Viton
734-007020-001 5009102019 O-Ring, Viton
734-007260-001 5009102016 O-Ring, Viton
734-007292-001 5009102022 O-Ring, Viton
734-007314-001 5009102021 O-Ring, Viton
734-007328-001 5009102023 O-Ring, Viton
734-007329-001 5009102011 O-Ring, Viton
734-007333-001 5009102009 O-Ring, Viton
734-007334-001 5009102002 O-Ring, Viton
734-007334-001 5009102010 O-Ring, Viton
734-007335-001 5009102001 O-Ring, Viton
734-007357-001 5099202252 O-Ring, Viton
734-007358-001 5099202248 O-Ring, Viton
734-007359-001 5009102025 Seal, Chamber
734-007359-001 5009106093 O-Ring, Viton
734-007369-001 5009102007 O-Ring, Viton
734-007369-001 5009102060 O-Ring, Quad
734-007460-001 5009102012 O-Ring, Viton
734-007460-001 5009102030 O-Ring, ELL Inner/Outer Door
734-007460-001 5009106095 O-Ring, Viton
734-007460-001 5099202204 O-Ring, Viton
734-007461-001 5099202226 O-Ring, Viton
734-007743-001 5009102026 O-Ring, Viton
734-007744-001 5009102024 O-Ring, Viton
734-007762-001 5009102040 Seal, Quad, Q4445 
734-007912-001 5009102000 O-Ring, Viton
734-008123-001 5009002001 O-Ring, Viton
734-008179-001 5009102008 O-Ring, Viton
734-008546-001 5009102006 O-Ring, Viton
734-008546-001 5009102061 O-Ring, Kalrez
734-008771-001 5009102027 O-Ring, Viton
734-008822-001 5009102017 O-Ring, Viton
734-008835-001 5009102047 O-Ring, Viton
734-008835-001 5009102050 O-Ring, Viton
734-008862-001 5009102020 O-Ring, Viton
734-008862-001 5009102082 O-Ring, Viton
734-008863-001 5009102018 O-Ring, Viton
734-008922-001 5009102036 O-Ring, Viton
734-008971-001 5009102063 O-Ring, Viton
734-009013-001 5009102004 O-Ring, Viton
734-009119-001 5009102076 O-Ring, Poly
734-009119-001 5009106050 O-Ring, Lifter
734-009250-001 5009102028 O-Ring, Viton
734-009767-001 5009102032 O-Ring, Viton
734-009868-001 5009102081 O-Ring, Viton
734-009869-001 5009102083 O-Ring, Viton
734-018491-001 5009102084 O-Ring, Viton
734-061280-010 5099202126 O-Ring, Viton
734-061280-109 5099202087 O-Ring, Line, Gas, Window, TCP
734-061280-281 5099202246 O-Ring, Viton
734-091193-001 5009102049 O-Ring, Viton
734-091993-001 5009102037 O-Ring, Silicon
734-091993-001 5009102052 O-Ring, Flouro Silicon, Window, Quartz
734-091993-001 5009106098 O-Ring, Flouro Silicon
734-091994-001 5009102033 O-Ring, Flouro Silicon, Cover, PLL
734-091994-001 5009106101 O-Ring, Flouro Silicon
734-091995-001 5009106096 O-Ring, Flouro Silicon
734092038-001 5009102055 O-Ring, Flouro Silicon, Ring, Gas, Outer, DSQ
734-092038-001 5009102038 O-Ring, Silicon
734-092038-001 5009106099 O-Ring, Flouro Silicon
734-092040-001 5009102054 O-Ring, Flouro Silicon, Door, Outer, DSQ
734-092040-001 5009102088 O-Ring, Flouro Silicon, Door, Inner, DSQ
734-092040-001 5009106100 O-Ring, Flouro Silicon
734-092040-001 5099202088 O-Ring, Flouro Silicon, Door, Inner, DSQ
734-092041-001 5009102048 O-Ring, Silicon
734-092041-001 5009102051 O-Ring, Flouro Silicon, Spacer, Quartz
734-092041-001 5009106097 O-Ring, Flouro Silicon
734-092107-001 5009102086 O-Ring, Seal
734-092561-278 5099202251 O-Ring, FSI
734-093789-001 5009106094 Seal, O-Ring, Gate, Chamber
739-000421-001 5009102072 Seal, .750
739-000422-001 5009102043 Seal, Teflon
739-000422-001 5009102071 Seal, .250
739-000983-001 5009102044 Seal, Teflon
739-000983-001 5009102069 Seal, Teflon, Small
739-000984-001 5009102046 Seal, Teflon
739-000984-001 5009102068 Seal, Teflon, Large
739-000985-001 5009102045 Seal, Teflon
739-000985-001 5009102070 Seal, Teflon, Medium
739-007783-001 5009002002 Seal, Quad, Q4454 
739-090783-001 5009106189 Contact, Strip, Copper
746-001125-001 5009101004 Bearing, Thrust, 1/4" ID
746-007608-001 5009101003 Washer, Thrust, .25" x .060"
746-007652-001 5009001004 Bearing, 15M, Cont, Angle, Row, Double
746-090156-001 5009001011 Bearing, Flanged, Shielded, Double
750-001127-001 5009001009 Chain, Roller, Link #25, Offset
750-002176-001 5009001007 kit, Master-Link #25
750-007781-001 5009001006 Chain, Roller, 52.00", SST, #25
750-007782-001 5009001010 Chain, Roller #35, 15.75" Lg.
750-090192-001 5009001002 Link, Master, SST, #35
752-000224-008 5009106107 Pin, Roll, 3/32 x 1/2 Lg.
752-000236-001 5009106108 Pin, Roll, 1/8 x 3/4
752-002045-005 5009106109 Pin, Roll, 1/16 x 3/8
752-007513-001 5009101006 Key, 3/32x0.60
754-007751-001 5009001015 Spring, Tensioner, SS
754-009002-015 5009101009 Spring, Compression, SST
754-009002-015 5009101009 Spring, Plunger, Assy, 30 lbs.
754-090359-015 5009101010 Spring, Compression, SST
754-090457-014 5009101008 Spring, Clamp, Retaining
754-091624-001 5009101007 Spring, Lower Plunger, LAM 4520
754-092082-002 5009001024 Bearing, Guide, w/Spring, Leaf
754-093243-006 5009001016 Spring, Cprsv, Wire, 9600
754-093243-006 Rev 1 5009001016 Spring, Assembly, Plunger, 9600
754-250529-001 5009106136 Spring, Screw, Shoulder
756-007809-010 5009001013 Screw, Schd, Shldr, 10-32
765-007786-001 5009001003 Sprocket, Driven, 1.214 Pd
766-008456-001 5009002000 Valve, Air
790-006301-001 5009176055 Lifter, Chamber, Back-up
790-008882-195 5009102066 Belt, Drive, Harmonic, XLL, Small
790-008882-205 5009102067 Belt, Drive, Harmonic, XLL, Large
790-092080-002 5009001022 Bearing, Lock, Over
790-092081-001 5009102087 Bolt, Crank
795-250729-001 5009106148 Lens,Convex
796-002672-001 5009102058 Gasket, Nupro
796-002673-001 5009102059 Stem, Nupro
796-002673-001 5009102064 Tip, Nupro
796-028633-010 5009126003 Screw, AL, Plate, Baffle
796-093622-001 5009106168 Gate
796-098648-001 5099202249 O-Ring, Seal, Gate
839-003958-001 5009106124 Diffuser, LL
839-012255-001 5009106255 Bellows, Gate, Inner
839-012255-001 5009106256 Repair, Bellows, Gate, Inner
839-031766-001 5009106279 Bellows, Lifter
839-140210-001 5009106186 Cover, ESC
720-090685-010 5009106290 Screw, Flathead, 4-40 x .63" Teflon
839-249094-001Rev A 6005000043 Housing, Pin, SiC
839-249332-001Rev E1 6005000032 Housing, Pin, SiC, SS
839-330303-001 5009106282 Weldment, Elbow, Fitting, Gas, Gap, Fixed
839-470315-001 5009126006 Cap, Gas
852-011060-001 6005000008 Kit, Gap
852-011060-xxx 6150000009 Kit, Sub-Assy, PM, Motor, RF, Gap
852-011061-001 6150000016 Kit, Sub-Assy, PM, Housing,Chamber, Electrode, Lower
852-011061-001 6150000018 Kit, Sub-Assy., PM, Housing, Chamber, Lower
852-012525-001 6150000020 Kit, Sub-Assy., PM, Spinner, Lifter
853-011555-001 6150000010 Kit, Sub-Assy, PM, Electrode, Upper
853-012100-003 6150000008 Kit, Sub-Assy, PM, Housing, Arm
853-012123-001 6150000012 Kit, Sub-Assy, PM, Housing, Chamber, Upper, Oxide
853-012200-002 6150000007 Kit, Sub-Assy, PM, Gate
853-250784-001-1 5009106212 Puck, Alignment
853-330721-001 6005000064 Assy, ACTR, JD, BAC
853-347413-006 5009106293 Rework, Paddle, Heater
853-347413-008 5009106301 Rework, Paddle, Heater, 200mm
853-441511-001 Rev 1 5009126005 Plate, Cap, Gas
857-010229-001 6005000010 Puck, Alignment
860-010113-001 6150000017 Kit, Sub-Assy, PM, Housing, Loadlock, Exit
  5009001000 Sprocket, Driven, 2.873 Pd
  5009100000 Clamp, Plunger & Retainer, Ceramic (4420)
  5009106114 Window, Block, Sapphire
  5009106121 Sleeve, Plunger, KEL-F
  5009106133 Ring, Clamp, Aluminum
  5009106155 Cover, APM
  5009106161 Fence, Cassette
  5009106185 Cover, Chamber
  5009106199 Coupler, Match
  5009106217 Plate, Pendulum
  5009106232 Window, Quartz, DXQ
  5009106247 Rod, Lexan
  5009106059 Arm, Tensioner, Chain, Pin
  5009106058 Arm, Tensioner, Chain
  5009176004 Bushing, Small, Delrin
  5009176056 Gasket, Teflon
  5009176057 Spacer
  6005000003 Kit, Plunger Assembly, Kel-F
  6005000009 Kit, Plunger, Ceramic
  6005000010 Assy, Puck, Alignment, 0.30"
  6005000011 Assy, Puck, Alignment, 1.1"
  6005000015 Kit, PM, Wet, DSQ, 9600
  6005000016 Kit, PM, Plunger, 9600
  6005000019 Kit, Clean, Chamber, 9600
  6005000020 Kit, PM, A, Level
  6005000021 Kit, PM, B, Level
  6005000022 Kit, PM, C, Level
  6005000023 Kit, PM, D, Level
  6005000030 Kit, PM, 490/590
  6005000031 Kit, Plunger, Long
  6005000047 Kit, PM, Rainbow, model 4528
  6005000048 Kit, Plunger
  6005000054 Kit, PM, Chamber, Main, 9600
  6005000057 Kit, PM, Plunger, 4500
  6005000059 Kit, Cap, Bolt, Retaining, Clamp

Didn't find what you were looking for?
Please contact VTI for module repair, part duplication and custom design services.


Copyright VariTech International 2007 ©