sOEM Spare Parts: Mattson










Mattson    

Please contact VTI for module repair, part duplication and custom design services.

OEM PN VTI PN DESCRIPTION
  71001-2300 Cassette, Anodized, 6"
  71001-2301 Cassette, Coated, Tufram, 6"
  71001-2302 Cassette w/Handle Plates, Coated, Tufram, 6"
  71001-2400 Cassette, Coated, Tufram, 8"
  71001-2401 Cassette, Solid Top w/Handle, Coated, Tufram, 8"
  5037106000 Grid, Lower
053-00017-00 5037106005 Flag, Down
062-00003-00 5037106011 Pin, Heater
062-00021-00 5037106012 Bracket,Element,Heater
062-00023-00 5037106001 Strap
062-02000-00 5037106014 Strap, Al, Solid, Short, Modified
062-02000-00 Rev 3 6042100000 Strap, Aluminum
062-03000-00 5037106013 Strap, Al, Solid, Long, Modified
062-03000-00 Rev 3 6042100001 Strap, Heater, CBL, 9"
141-00025-00 Rev 3 5037106004 Mount, Sensor, Rotar, Shuttle
141-00040-00 Rev 2 5037106003 Shuttle, Flag, Rotate
141-00064-00 5037106002 Pins, Search, Pin
152-00008-00 5099202230 O-Ring, Flurosilicone
189-00001-00 5037106017 Nest, Cassette, 8"
199-01002-00 5037106009 Window, Plexiglass, Robot
262-00001-00  Rev 01 5037106018 Collar, Ceramic, Spindle
303-08253-00 5037106016 Strap, Heater, L-Shape
303-08253-00 5037106015 Strap, Heater, L-Shape
456-00226-94 5099202231 O-Ring, Viton
456-01027-02 5099202232 O-RIng, Flurosilicone
456-01027-03 5099202233 O-Ring, Viton
456-01027-08 5099202218 O-Ring, Fluorosilicone
456-09062-00 5037102002 Seal, Lip, Shaft
533-04082-00 5099106216 Element, Heater, 110V, 750W
544-00016-00 Rev 6 5037106010 Grid
913-10053-00 5099202219 O-Ring,Silicon
913-10054-00 5099202236 O-Ring, Viton
913-10066-00 5099202237 O-Ring, Kalrez
913-11003-00 5037102001 Seal, Lip
913-12003-00 5037102003 T-Seal
916-11002-00 5037106006 Sheath, TC
  5037106024 Plate, Transformer, RF, Mattson
  5099106209 Shaft, Puller
  6002200088 Brace, AL
  6042100003 Plate, Support, Cassette

Didn't find what you were looking for?
Please contact VTI for module repair, part duplication and custom design services.


Copyright VariTech International 2007 ©