Novellus

Please contact VTI for module repair, part duplication and custom design services.

OEM PN VTI PN DESCRIPTION
02-00008-00 6001000038 Assy, Adjustment, Head, Gas
02-00008-01 6001000073 Kit, Gas Head Adjustment, C1
02-00078-00 6001000050 Kit, PM, T/C
02-00163-00 6001000047 Kit, Assembly, Fork, Spindle
02-00343-02 5015704010 Assembly, Harness, 10"
02-00343-03 5015704012 Cable Harness Opto-Sensor 17.5"
02-00343-04 5015704013 Cable Harness Opto-Sensor 26.5"
02-00397-01 5015704016 Harness Assy, Sensor, 26.5"
02-032454-00 6001000075 Kit, Distribution, Plate, Gas
02-033644-00 6001000045 Kit, PM, Chamber Top, V-Port, SPD
02-111903-00 6001700002 Assembly. Feedthru, RF
02-119726-00 6001000077 Sequel Express Anti-deflection Assy
02-130205-00 6001700007 Gate, L-Type
02-137467-45 5015006184 Holder, Ceramic, 45˚, 300mm
02-141488-07 5015006183 Holder, Ceramic, 67˚, 300mm
03-00215-00 6001700004 Showerhead, Diffuser, Gas
05-000024-00 6001000053 PM, Kit, Heater, Conn Dual Frequency
05-00005-00 6001000046 Kit, PM, Retro, 1P, Heater, Replacement
05-00007-00 6001000052 Kit, PM, Chamber, Reacter
05-00013-00 6001000049 Kit, PM, Overhaul, Spindle
05-00023-00 6001000051 Kit, PM, Semi-Annual
05-00024-00 6001000010 Kit, PM, Heater, Frequency, Dual
05-00024-00 6001000037 Kit, PM, Heater, Frequency, Dual
05-10306-00 6001000039 Kit, PM, WCVD Spindle Shaft
05-114025-00 6001700017 Kit, Shim
05-11902-00 6001000066 Kit, Upgrade, Strap, Feedthru, RF
10-00072-00 5015702014 Tubing, Gas, Distribution,PFA
15-00027-02 5015006047 Guide, Nozzle Adjuster
15-00043-02 5015006054 Adjuster, Ceramic, Gas Plate
15-00093-00 Rev.G 5015006050 Panel, Lock, Load
15-00126-00 5015006034 Strap, Heater Ground, Aluminum
15-00229-00 Rev.B 5015006048 Nut, Hex, 1/2 - 20, Aluminum
15-00309-00 5015006172 Hanger, Nozzle, 200mm
15-00309-01 5015006077 Hanger, Nozzle, 1.50" (200mm)
15-00309-01 Rev. J 5015006119 Screw, Head, Gas
15-00311-00 5015006022 Nut, Cap, 1/4-20, Ni
15-00341-00 5015006041 Screw, HexHd, 1/4 - 20 x 1/4", Ni
15-00371-00 5015006035 Nut, Hex, 1/4 - 20, Ni
15-00371-00 5015006057 Nut, Hex, 1/4 - 28, Ni
15-00372-00 5015006016 Washer, Flat, 1/4", Ni
15-00385-00 5015006017 Nut, Hex, 10-32, Ni
15-00386-00 5015006010 Washer, #10, Ni
15-00386-00 Rev. D 5015006081 Washer, w/Flat, #10, Ni
15-00398-00 5015006075 Screw, Support, Heater
15-00399-02 5015006020 Screw, 8-32 x 0.96", Ni
15-00399-03 5015006018 Screw, Spindle, Top
15-00399-04 5015006019 Screw, Spindle, Top 1.02LG
15-00399-05 5015006013 Screw, Spindle, Top 1.12LG
15-00401-00 5015006123 Shaft, Spindle
15-00409-00 5015066000 Window, Pyrex
15-00409-00 5015066002 Window, Quartz
15-00416-00 5015006147 Flange, Ring, Spacing, 4"
15-00457-00 5015006021 Screw, Strap, Heater, 10-32 x 0.25", Ni
15-00475-00 Rev.D 5015006015 Insulator, Gas Feedthru, Ceramic
15-00479-00 5015006177 Gear, Geneva
15-00553-05 5015006027 Shim, Heater, .005", Flat
15-00553-10 5015006028 Shim, Heater, .010", Flat
15-00553-18 5015006195 Shim, Heater, 0.018 Flat
15-00553-25 5015006200 Shim, Flat, 0.025
15-00553-31 5015006029 Shim, Heater, .031", Flat
15-00554-05 5015006025 Shim, Heater, .005", V-Type
15-00554-10 5015006024 Shim, Heater, .010", V-Type
15-00554-18 5015006196 Shim, Heater, 0.018", V-Type
15-00554-25 5015006201 Shim, V Typw, 0.025
15-00554-31 5015006026 Shim, Heater, .031", V-Type
15-00558-01 5015006052 Sleeve, Lead, Htr, 2.00", Ceramic
15-00558-02 5015006053 Sleeve, Lead, Htr, 2.75", Ceramic
15-00567-00 5015006031 Cap, TC, 1/8" ID, Ceramic
15-00578-00 Rev.D 5015006083 Sleeve, Flanged, Feedthru, Htr, Ceramic
15-00614-00 5015006030 Cap, TC, 1/16" ID, Ceramic
15-00653-00 5015006186 Spindle Hub Mount Clamp
15-00654-00 5015006002 Clamp, Adjustment, Rotation 
15-00684-00 5015006098 Cap,TC,1/16"ID,Ceramic
15-00685-00 5015006046 Feedthru, O-Seal, 3/8", UltraTorr
15-00686-00  5015006049 Washer, Feedthru, 1/2" ID, Aluminum
15-00698-00 5015006012 Screw, Fork
15-00699-01 5015006007 Finger, Fork, 7.5"
15-00700-00 5015006105 Plate, Retainer, Fork, Bottom
15-00701-00 5015006001 Fork, Plate, Bottom 
15-00702-00 5015006106 Plate, Retainer, Fork, Top 
15-00703-00 5015006000 Fork, Plate, Top 
15-00721-00 5015006036 Washer, #8 Ni
15-00729-00 5015006003 Clamp, Flat
15-00730-00 5015006004 Flange, Keyed 
15-00731-00 5015006006 Bushing, Keyed, Ceramic
15-00839-00 5015006132 Screw, Ni 1/4-20 x .9 LG
15-00866-00 5015006127 Spring, Ceramic
15-00932-00 5015006107 Screw, 1/4-20 x .50" LG, Nickel (Concept Two)
15-00935-01 5015006093 Screw, 10-32 X .5, Ni 
15-00935-01 (Mod.) 5015006162 Screw, Hex, Socket, Nickel
15-00951-00 5015006014 Cup, Screw Cover
15-00982-00 5015006167 Shaft, Spindle
15-01049-00 5015006212 Paddle, 6", Molybdenum
15-01049-00 5015006213 Paddle, 6", Ceramic
15-01050-01 5015006260 Shims, Paddle, 0.002" Thick
15-01050-02 5015006261 Shims, Paddle, 0.003" Thick
15-01050-03 5015006262 Shims, Paddle, 0.005" Thick
15-01103-00 Rev A 5015006171 Shaft, Lift, Ring
15-01104-00 5015006110 Screw, 10-32 x .75, Nickel 200
15-01104-00 5015006129 Screw, 10-32 x .75, Ni (0.100 Shoulder)
15-032014-01 5015066003 Window, Quartz, EP Option
15-024611-00 Rev. C 5015006161 Arm, Robot
15-024881-00 5015006155 Fork, End, Cap
15-028766-00 5015006125 Ring, Guard, 200mm
15-032014-00 5015066004 Window, Quartz, Etch Resistant
15-032016-00 5015006178 Pin, Insert, Ceramic
15-032451-00 5015006126 Window, Chamber, Lexan
15-032452-00 5015006126 Window, Lexan, Chamber
15-032502-00 5015006111 Pin, Lift, Wafer
15-032631-00  5015006080 Flange, Keyed
15-032777-00 5015006118 Ring, Moer, 2.00
15-032939-00 5015006169 Ring, Moer, 2.25mm
15-033278-00 5015006144 Ring, V-Port 
15-033279-00 5015006145 Viewport, Lexan
15-033874-00 5015006142 Plug, Injector, Manifold
15-033947-00 5015006124 Plate, Cover, 200mm (P.E.C.)
15-034333-00 5015006117 Tube, Injector, Process
15-034851-00 5015002058 Bushing, Split
15-046056-00 5015006109 Bolt, Non-Vented, 1/4-20 x 1.0" Ni
15-046056-00 5015006112 Bolt, Vented, 1/4-20 x 1.0" , Ni
15-050160-15 5015006227 Tube, Ceramic, 1.5"
15-051711-25 5015006149 Tube, Ceramic, 2.5"
15-052375-00 5015006205 Finger, Ceramic, Plate, Transfer
15-052619-00 Rev.D 5015006099 Tong, Ceramic,8"
15-053271-02 5015006192 Tube, Injector, Gas, Clean
15-053394-01 Rev.A 5015006082 Finger, Fork, Ceramic, MC
15-053394-02 Rev.A 5015006121 Finger, Fork, Ceramic, MC, 200mm
15-053394-03 5015006158 Finger, Fork, Ceramic, MC, 200mm-Modified
15-053394-03  5015006157 Finger, Fork, Ceramic, MC, 200mm--New Style
15-054434-01 REV A 5015006215 Ring, Moer, 3.0mm
15-054434-02 5015006168 Ring, Moer, 1.50mm
15-054434-03 5015006274 Ring, Moer, 2.5mm
15-054577-00 5015006204 Holder, Wafer, Ring, Moer
15-054583-00 5015006203 Clip, Retaining, Holder, Moer
15-054585-00 5015006206 Ring, Moer, 2.25mm
15-055720-00 5015001002 Ring, Spacer
15-055721-00 5015002033 Bushing, Split
15-100603-00 5015006202 Insulator, Distribution, Gas
15-101482-00 5015006138 Fork, Top Plate, A, Antideflect
15-101482-01 5015006140 Fork, Top Plate, Antideflect
15-101482-02 5015006151 Fork, Top Plate, Antideflect
15-103651-00 5015006164 Ring, Guard, Hi Purity, 200mm
15-103913-01 5015006101 Feedthru,Copper, (Upgrade)
15-103913-02 5015006096 Clamp, Strap, Feedthru
15-103913-03 5015006189 Sheath, Teflon
15-103913-04 5015006194 Sheath, Teflon, Feedthru
15-10489-00 5015006174 Mount, Slide, Window
15-105508-00 5015006197 Ring
15-107698-00 5015006083 Sleeve, Flanged, Feedthru, Htr, Ceramic
15-108174-00 5015006102 Cup, Cover, Screw
15-108307-00 5015006095 Clamp, Strap, RF
15-110411-00 5015066007 Window, Sapphire, Pure, Thin
15-11085-00 Rev A 5015006253 Mount, Sensor, Bottom
15-11188-00 5015006188 Window, Zelux
15-113064-00 5015006137 Nozzle, Injector, Speed-S
15-113064-00 6001700010 Nozzle, Injector, Speed-S
15-114331-00 5015006094 Screw, Cap, Nickel, 1/4-20 x 0.5
15-11606-00 5015006259 Insulator, Gas Distribution, Ceramic
15-119059-00 5015006159 Screw, Cap, Nickel, 1/4-20 x .25lg
15-120150-01 5015006193 Tube, Injector
15-122178-00 Rev A 5015006264 Carrier Ring, 300mm
15-122178-00 5015006207 Ring, Carrier, Spindle, Upper
15-123086-01 5015006191 Tube, Injector 
15-130746-01 5015006185 Fork, Dimple, Ceramic
15-156718-00 5015006176 Ring, Moer, 1.0mm
15-161439-00 5030000011 Iridia Isolator Plate
15-250025-00 5015006251 Insert, MESC
15-250878-00 5015006182 Screw, Ceramic
15-259022-20 5015006225 Injector, Sapphire, Solid, 0.020
15-259022-21 5015006219 Injector, Sapphire, Solid, 0.021
15-259022-22 5015006220 Injector, Sapphire, Solid, 0.022
15-259022-23 5015006221 Nozzle, Injector, Speed
15-259022-24 5015006226 Injector, Sapphire, Solid, 0.024
15-307812-00 5015006105 Plate, Fork, Bottom
15-307813-00 5015006106 Plate, Fork, Top
15-325835-00 5015006001 Plate, Fork, Bottom
15-325836-00 5015006000 Plate, Fork, Top
16-00092-00 5015006044 Strap, Heater, Insulated
16-00092-00 5015006084 Strap, Heater, Angled, Insulated
16-00098-00 5015006043 Strap, Heater, Insulated, Long, Standard
16-00098-00 5015006166 Strap, Heater, Insulated, Long, EZ
16-033931-00 6001700011 Showerhead, 8"
16-033932-00 6001700003 6" Showerhead
17-00094-00 5015006032 Strap, Bias, LF, Aluminum  
17-00094-01 5015006103 Strap, LF Bias, Aluminum
17-00094-01 5015006217 Strap, LF Bias, Aluminum, Modified
17-00148-00 Rev. D 5015006011 Spring, Fork
17-032018-00 5015006181 Screen, RF
17-101596-00 5015006139 Retainer, Fork
17-103987-00 5015006092 Strap, RF  
19-00056-00 6001700001 Assembly, Feedthru, Heater
19-00056-00 6101000009 Sub-Assembly, Feedthru, RF, Refurbishment
19-00156-00 5015704011 PCB, Digital I/O, 519A#1
19-00266-01 5015704005 Motor, Ext
19-00267-01 5015704006 Motor, Rotation
19-00268-01 5015704004 Motor, Lift
19-00273-00 5015006108 Washer, Spring, Modified
19-034573-04 5015001013 Bearing, WTM, Linear/Rotary 1"
20-00064-00 5015001019 Spring, Compression, 7/8"x0.36"
20-00153-00 5015006058 Ball, Support, Heater,Ceramic, 2"
20-00155-00 5015006265 Washer, Wave
20-00212-00 5015006079 Nut, 8-32, Aluminum
20-00221-00 5015006085 Washer, #8, Flat, Aluminum
20-00222-00 5015006104 Washer, Flat, 1/4", Aluminum
20-00224-00 5099010000 Washer, .920OD x .200, D
20-00244-00 5015006115 Nut, Hex, 1/4-20, Brass
20-00248-00 5015001009 Bearing  
20-00248-00 5099010001 Spacer, #5 Shaft x 0.060" TK
20-00249-00 5015001008 Screw
20-00249-00 5015006209 Screw, Shoulder, 4-40x5/32"
20-00257-00 5015006268 Washer, Spring, 1.25OD
20-00428-00 5015006218 Ring, Retainer
20-00452-00 5015006134 E-Ring, 1/2"
21-00041-01 5099010002 Screw, Set 4-40 1/4 LG, SS
21-00064-00 5099010003 Washer, Flat, #10 
21-00067-00 5099010004 Washer, Lock, #4
21-00093-00 5099010005 Screw, 10-32 3/8 LG, SS, SKTHD
21-00137-00 5099010006 Screw, 10-32 UNF X 7/8LG, SS
21-00188-00 5099010007 Washer, Lock, #8
21-00258-00 5099010008 Screw, FltHd, Cap, 8-32 x 3/4"
21-00279-00 5099010098 Screw, SHC 10-32 x 0.50", SS
21-00327-00 5099010009 Screw, Set, Pt, Cup, 8-32 x 3/8"
21-00332-00 5099010010 Screw, Set HexSkt, 10-32, 1/2" SS
21-00339-00 5099010011 Nut, Hex, 10-32, SS
21-00404-00 5099010012 Screw, Cap SH, 1/4-20 X .87L
21-00457-00 5099010013 Screw, .250 X 3.00 SHCS, SS
21-026381-00 5099010014 Screw, Pan, Phil, MS X 6MM
21-028813-00 5099010015 SCR, BTNHD, SOC, #10-24 X .75, SS
21-029987-00 5099010016 Screw, Button HD, 8-32 X 3/8, SS
21-033037-00 5099010019 SHCS, Vented, #8-32 X .50 SST
21-034441-00 5099010022 Screw, Vented, 1/4-20 X 1.00, SS
21-041264-04 5099010023 Screw, Skt, Hex, 4-40 X 1/4, SS
21-041264-06 5099010024 Screw, Skt, Hex, 4-40 X 3/8, SS
21-041264-08 5099010025 Screw, Skt, Hex, 4-40 X 1/2, SS
21-041264-12 5099010026 Screw, Skt, Hex, 4-40 X 3/4, SS
21-041264-16 5099010027 Screw, Skt, Hex, 4-40 X 1, SS
21-041264-20 5099010028 Screw, Skt, Hex, 4-40 X 1-1/4, SS
21-041264-24 5099010029 Screw, Skt, Hex, 4-40 X 1-1/2, SS
21-041266-06 5099010030 Screw, Skt, Hex, 6-32 X 3/8, SS
21-041266-08 5099010031 Screw, Skt, Hex, 6-32 X 1/2, SS
21-041266-10 5099010032 Screw, Skt, Hex, 6-32 X 5/8, SS
21-041267-06 5099010033 Screw, Skt, Hex, 8-32 X 3/8, SS
21-041267-08 5099010034 Screw, Skt, Hex, 8-32 X 1/2, SS
21-041267-10 5099010035 Screw, Skt, Hex, 8-32 X 5/8, SS
21-041267-12 5099010036 Screw, Skt, Hex, 8-32 X 3/4, SS
21-041267-16 5099010037 Screw, Skt, Hex, 8-32 X 1, SS
21-041268-16 5099010038 Screw, Skt, Hex, 10-24 X 1, SS
21-041269-04 5099010039 Screw, Skt, Hex, 10-32 X 1/4, SS
21-041269-06 5099010040 Screw, Skt, Hex, 10-32 X 3/8, SS
21-041269-08 5099010041 Screw, Skt, Hex, 10-32 X 1/2, SS
21-041269-12 5099010042 Screw, Skt, Hex, 10-32 X 3/4, SS
21-041269-14 5099010043 Screw, Skt, Hex, 10-32 X 7/8, SS
21-041269-16 5099010044 Screw, Skt, Hex, 10-32 X 1, SS
21-041269-24 5099010045 Screw, Skt, Hex, 10-32 X 1-1/2, SS
21-041269-40 5099010046 Screw, Skt, Hex, 10-32 X 2-1/2, SS
21-041270-10 5099010047 Screw, Skt, Hex, 1/4-20 X 5/8, SS
21-041270-12 5099010048 Screw, Skt, Hex, 1/4-20 X 3/4, SS
21-041270-14 5099010049 Screw, Skt, Hex, 1/4-20 X 7/8, SS
21-041270-16 5099010050 Screw, Skt, Hex, 1/4-20 X 1, SS
21-041273-10 5099010051 Screw, Skt, Hex, 5/16-24 X 5/8, SS
21-041273-12 5099010052 Screw, Skt, Hex, 5/16-24 X 3/4, SS
21-041298-04 5099010053 Screw, Flat, Hex, 4-40 X 1/4, SST
21-041301-06 5099010054 Screw, Flat, Hex, 8-32 X 3/8, SS
21-041301-10 5099010055 Screw, Flat, Hex, 8-32 X 5/8, SS
21-041301-12 5099010017 Screw, Flat, Hex, 8-32 X 3/4, SS
21-041303-10 5099010018 Screw, Flat, Hex, 10-32 X 5/8, SS
21-041342-08 5099010020 Screw, Pan, Phil, 4-40 X 1/2, SS
21-041342-24 5099010021 Screw, Pan, Phil, 4-40 X 1-1/2, SS
21-041345-05 5099010056 Screw, Pan, Phil, 6-32 X 5/16, SS
21-041345-12 5099010057 Screw, Pan, Phil, 6-32 X 3/4, SS
21-041345-14 5099010058 Screw, Pan, Phil, 6-32 X 7/8, SS
21-041346-04 5099010059 Screw, Pan, Phil, 8-32 X 1/4, SS
21-041346-06 5099010060 Screw, Pan, Phil, 8-32 X 3/8, SS
21-041902-04 5099010061 Screw, But, Hex, 4-40 X 1/4, SS
21-041903-08 5099010062 Screw, But, Hex, 6-32 X 1/2, SS
21-041906-06 5099010063 Screw, But, Hex, 10-32 X 3/8, SS
21-041906-08 5099010064 Screw, But, Hex, 10-32 X 1/2, SS
21-041906-24 5099010065 Screw, But, Hex, 10-32 X 1-1/2, SS
21-041953-07 5099010066 Nut, Hex, 4-40, SST
21-041953-13 5099010067 Nut, Hex, 10-32, SST
21-041953-14 5099010068 Nut, Hex, 1/4-20, SST
21-041953-16 5099010069 Nut, Hex, 5/16-18, SST
21-041953-18 5099010070 Nut, Hex, 3/8-16, SST
21-041953-22 5099010071 Nut, Hex, 1/2-13, SST
21-042022-04 5099010072 Washer, Flat, Small OD, 4, SST
21-042022-08 5099010073 Washer, Flat, Small OD, 0, SST
21-042023-03 5099010082 Washer, Lock, #4, SS
21-042023-04 5099010074 Washer, Flat, 4, SST
21-042023-06 5099010075 Washer, Flat, 6, SST
21-042023-07 5099010076 Washer, Flat, 8, SST
21-042023-08 5099010077 Washer, Flat, 10, SST
21-042023-09 5099010078 Washer, Flat, 1/4, SST
21-042023-10 5099010079 Washer, Flat, 5/16, SST
21-042023-11 5099010080 Washer, Flat, 3/8, SST
21-042023-13 5099010081 Washer, Flat, 1/2, SST
21-042024-03 5099010082 Washer, Lock, 4, SST
21-042024-05 5099010083 Washer, Lock, 6, SST
21-042024-06 5099010084 Washer, Lock, 8, SST
21-042024-07 5099010085 Washer, Lock, 10, SST
21-042024-08 5099010086 Washer, Lock, 1/4, SST
21-042024-09 5099010087 Washer, Lock, 5/16, SST
21-042024-10 5099010088 Washer, Lock, 3/8, SST
21-042024-12 5099010089 Washer, Lock, 1/2, SST
21-043547-00 5099010090 Screw, Pan, Phil, M4 X 6MM, SS
21-046973-00 5099010091 Screw, SOC, Nylon, 1/4-20 X 1/2"
21-046974-00 5099010092 Screw, FHD, Nylon, 10-32 X 1/2"
21-10074-00 5015001012 Screw, 8-32 X .38, Vent, SS, SktHD
21-10316-00 5099010094 Screw, 3/8-16 X 5/8, Slot, Pan, SST
21-104230-00 5099010095 SCR, Set, Flt PT, 10-32 X .75, Alloy
21-120456-00 5099010096 SCR, FH, 6-32 X 3/8, Undercut, Phil
22-00006-00 5015005002 Filter, Mini Waferguard, L-P, VCR, 1/4" 
22-00021-01 5015002016 O-Ring, Viton
22-00021-01 5015002019 O-Ring, Kalrez
22-00036-00 5015002074 Ftg, 3/8 Ultra-Torr, 1/4 NPT
22-00118-00 5015002005 O-Ring, Viton
22-00137-00 5015002001 O-Ring, Viton
22-00152-00 5015002030 O-Ring, Viton
22-00202-00 5015702004 Fitting, Tube, 1/8" MPT-O x 1/8"
22-00206-00 5015001007 Bearing, WTM, Linear/Rotary 1"
22-00217-00 5015002006 O-Ring, Viton
22-00234-00 5015002000 O-Ring, Viton
22-00235-00 5099202224 O-Ring, Viton
22-00236-00 5015002003 O-Ring, Viton
22-00239-00 5015002056 O-Ring, Viton
22-00256-00 5015002024 Seal, Static, Spindle
22-00256-00 5099202191 O-Ring, Viton
22-00256-00 5099202192 O-Ring, Viton
22-00288-00 5015001010 Bearing
22-00288-00 5015002023 Seal, T, Spindle
22-00288-00 5099202097 Seal, T
22-00297-00 5015002054 Ferrule, Front
22-00299-00 5015002031 O-Ring, T-Seal
22-00299-00 5015006210 Bearing, Cam, Follower
22-00324-00 5015002008 Seal, Lip, Indexer
22-00324-00 5015702000 Seal, Lip
22-00325-00 5015002007 Seal, Outer Lip, Indexer
22-00326-00 5015002004 O-Ring, Viton, Door, Cassette
22-00342-00 5015002073 Nut, 3/8" O-Seal (UltraTorr)
22-00343-00 5015002045 Sleeve, 3/8" O-Seal, UltraTorr
22-00344-00 5015002014 O-Ring, Viton
22-00344-00 5015002017 O-Ring, Kalrez
22-00345-00 5015002066 O-Ring, Viton
22-00361-00 5015002002 O-Ring, Viton, Reactor, Barrel
22-00361-00 5099202190 O-Ring, Viton
22-00387-00 5015002015 O-Ring, Viton
22-00387-00 5015002018 O-Ring, Kalrez
22-00391-00 5099202225 O-Ring, Viton
22-00417-00 5015001004 Gasket/ Retainer, VCR, 1/4, Nickel
22-00425-00 5015002052 Nut, Swagelok
22-00426-00 5015002053 Ferrule, Back
22-00612-00 5015702011 Valve, VCR, Female, 1/4", NC, Springless
22-00631-00 5015002049 Assembly, Seal
22-00656-00 5015002009 O-Ring, Kalrez
22-00656-00 5015002069 O-Ring, Kalrez
22-00657-00 5015002011 O-Ring, Kalrez
22-00658-00 5015002010 Seal, Flange
22-00716-00 5099202238 O-Ring, Kalrez
22-00718-00 5099202241 O-Ring, Kalrez
22-010068-00 5099202239 O-Ring, Viton
22-010069-00 5099202240 O-Ring, Viton
22-026085-00 5015702010 Valve, Pneumatic, 2 Actuator, 3 Port
22-026373-00 5015005009 M/F, VCR, 1/4"
22-028206-00 5015006133 Screw, Skt, Hex, 10-32 x0 .5,Vented,Nickel Plated
22-028382-00 5015002048 Seal, Flange
22-033574-00 5099202217 O-Ring, Viton
22-046263-00 5015006148 Coupling
22-10018-00 5015002026 Seal, Door, Loadlock
22-100613-00 5015066008 Ball, Sapphire, 3/16" dia
22-10069-00 5099202245 O-Ring, Viton
22-101315-00 5015001001 Spacer, Bushing, Split, Spindle
22-10322-00 5015002067 O-Ring, Viton
24-10367-00 5015002065 O-Ring, Viton
22-10413-00 5015002057 O-Ring, Viton
22-112015-00 5015006199 Follower, Feedthru, RF
22-112017-00 5015006113 Washer, Flat, Brass
22-112018-00 5015006114 Nut, Hex, 1/4-28, Brass
22-123217-00 5015002068 O-Ring, Kalrez, -261, 4079
24-10002-00 5015704007 Sensor, L Shape
27-00010-01 5015702005 Thermocouple, Type J, 1/8"
27-00029-00 5015704000 Quad Output Power Supply
27-00066-00 5015704001 24-Volt Power Supply
27-053667-00 5015704014 Controller, Pressure
27-053911-00 5015704015 Controller, Valve Display
27-10343-00 5015002072 Manometer, 10 Torr, Heated
27-118072-00 5015704002 Match, Auto
27-179819-00 5015002050 Valve Alkon 239/R2 24 VDC
31-00114-00 5015704003 Relay, SSR, 90A
34-00133-00 5015006070 Seal, Feedthru, Elec, Teflon
36-00012-04 5015001003 Fuse
60-00013-00 5015702006 Cylinder, Pneumatic, LL Door
60-00019-00 5015702002 Ring, Centering, O-Ring, KF25
60-00026-00 5015001006 Ring, Centering, O-Ring, NW100
60-00039-00 5015002055 Seal, Ctring Assy, NW40
60-00091-00 5015001020 Cylinder, Pneumatic, Spindle Shaft
60-00180-00 5015001005 Transducer, Vacuum, Flange, KF25
60-00187-00 5015001021 Actuator, Rotary Vane, Pneumatic
60-00194-00 5015001022 Switch, Vacuum, 20 Torr
60-10059-00 5015005010 Filter, CDA
60-10129-00 6001700005 Gate, Aluminum
  5015006216 PEC
  5015006255 Door, Speed, 261
  5099202222 O-Ring, Flouro Silicon
  5099202223 O-Ring, Flouro Silicon
  6001000000 Kit, Upgrade, Load, Ceramic 
  6001000001 Kit, PM, Heater
  6001000002 Kit, PM, Day, 30
  6001000003 Kit, PM, Day, 90 
  6001000004 Kit, PM, Day, 180 
  6001000006 Kit, O-Ring
  6001000007 Kit, PM, Quarterly
  6001000008 Kit, Concept One, Shower Head, Kalrez
  6001000009 Kit, Concept One, Shower Head, Viton
  6001000011 Kit, PM, Day, 30
  6001000012 Kit, PM, Rebuild, Spindle
  6001000013 Kit, PM, Replacement, T-Seal
  6001000014 Kit, PM, Loadlock, Day, 180
  6001000016 Kit, PM, Seal, Chamber, Process, 90 Day
  6001000018 Kit, PM, Clean, Wet, Day, 180
  6001000019 Kit, PM, Clean, Wet, Day, 90
  6001000020 Kit, PM, Wet, Day, 30
  6001000021 Kit, Replacement, Head, Shower
  6001000022 Kit, PM, Quarterly
  6001000024 Kit, PM, Seal, Annual
  6001000026 Kit, PM, Semi-Annual
  6001000028 Kit, PM, Seal, Day, 30
  6001000031 Kit, PM, Strap, Bias, LF
  6001000032 Kit, PM, Hardware, Nickel
  6001000033 Kit, PM, Strap, RF, Heater
  6001111363 Kit, PM, Replacement, Mount, Showerhead
  6001000062 Kit, O-Seal
  6001000064 Kit, PM, Speed
  6001700013 Tool, Removal, Spindle
  6001700014 Tool, Removal, Spindle
  6101000004 Kit, PM, Hardware  
  6101000011 Kit, PM, Heater
  6101000012 Kit, Rebuild, Spindle
  70005-4402 Handle, Cassette, 6"
  71001-3300 Cassette, 6"
  71001-3400 Cassette, 8"
  72004-3000 Cart, PM
  79001-1003 Tool, Alignment, Showerhead, 6" Schematic
  79001-1004 Tool, Alignment, Showerhead, 8" Schematic
  79001-1005 Tool, Alignment, Showerhead, 8", Maxus Schematic
  79001-1006 Tool, Alignment, 8", Modified
  79001-1008 Tool, Alignment, 6", Modified

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