Novellus Please contact VTI for module repair, part duplication and custom design services. OEM PN VTI PN DESCRIPTION 02-00008-00 6001000038 Assy, Adjustment, Head, Gas 02-00008-01 6001000073 Kit, Gas Head Adjustment, C1 02-00078-00 6001000050 Kit, PM, T/C 02-00163-00 6001000047 Kit, Assembly, Fork, Spindle 02-00343-02 5015704010 Assembly, Harness, 10" 02-00343-03 5015704012 Cable Harness Opto-Sensor 17.5" 02-00343-04 5015704013 Cable Harness Opto-Sensor 26.5" 02-00397-01 5015704016 Harness Assy, Sensor, 26.5" 02-032454-00 6001000075 Kit, Distribution, Plate, Gas 02-033644-00 6001000045 Kit, PM, Chamber Top, V-Port, SPD 02-111903-00 6001700002 Assembly. Feedthru, RF 02-121642-00 74003-1210 Chuck, DS-1 1C, ESC, Rebuild 02-130205-00 6001700007 Gate, L-Type 02-137467-45 5015006184 Holder, Ceramic, 45˚, 300mm 02-141488-07 5015006183 Holder, Ceramic, 67˚, 300mm 03-00215-00 6001700004 Showerhead, Diffuser, Gas 05-000024-00 6001000053 PM, Kit, Heater, Conn Dual Frequency 05-00005-00 6001000046 Kit, PM, Retro, 1P, Heater, Replacement 05-00007-00 6001000052 Kit, PM, Chamber, Reacter 05-00013-00 6001000049 Kit, PM, Overhaul, Spindle 05-00023-00 6001000051 Kit, PM, Semi-Annual 05-00024-00 6001000010 Kit, PM, Heater, Frequency, Dual 05-00024-00 6001000037 Kit, PM, Heater, Frequency, Dual 05-10306-00 6001000039 Kit, PM, WCVD Spindle Shaft 05-114025-00 6001700017 Kit, Shim 05-11902-00 6001000066 Kit, Upgrade, Strap, Feedthru, RF 10-00072-00 5015702014 Tubing, Gas, Distribution,PFA 15-00027-02 5015006047 Guide, Nozzle Adjuster 15-00043-02 5015006054 Adjuster, Ceramic, Gas Plate 15-00093-00 Rev.G 5015006050 Panel, Lock, Load 15-00126-00 5015006034 Strap, Heater Ground, Aluminum 15-00229-00 Rev.B 5015006048 Nut, Hex, 1/2 - 20, Aluminum 15-00309-00 5015006172 Hanger, Nozzle, 200mm 15-00309-01 5015006077 Hanger, Nozzle, 1.50" (200mm) 15-00309-01 Rev. J 5015006119 Screw, Head, Gas 15-00311-00 5015006022 Nut, Cap, 1/4-20, Ni 15-00341-00 5015006041 Screw, HexHd, 1/4 - 20 x 1/4", Ni 15-00371-00 5015006035 Nut, Hex, 1/4 - 20, Ni 15-00371-00 5015006057 Nut, Hex, 1/4 - 28, Ni 15-00372-00 5015006016 Washer, Flat, 1/4", Ni 15-00385-00 5015006017 Nut, Hex, 10-32, Ni 15-00386-00 5015006010 Washer, #10, Ni 15-00386-00 Rev. D 5015006081 Washer, w/Flat, #10, Ni 15-00398-00 5015006075 Screw, Support, Heater 15-00399-02 5015006020 Screw, 8-32 x 0.96", Ni 15-00399-03 5015006018 Screw, Spindle, Top 15-00399-04 5015006019 Screw, Spindle, Top 1.02LG 15-00399-05 5015006013 Screw, Spindle, Top 1.12LG 15-00401-00 5015006123 Shaft, Spindle 15-00409-00 5015066000 Window, Pyrex 15-00409-00 5015066002 Window, Quartz 15-00416-00 5015006147 Flange, Ring, Spacing, 4" 15-00457-00 5015006021 Screw, Strap, Heater, 10-32 x 0.25", Ni 15-00475-00 Rev.D 5015006015 Insulator, Gas Feedthru, Ceramic 15-00479-00 5015006177 Gear, Geneva 15-00553-05 5015006027 Shim, Heater, .005", Flat 15-00553-10 5015006028 Shim, Heater, .010", Flat 15-00553-18 5015006195 Shim, Heater, 0.018 Flat 15-00553-25 5015006200 Shim, Flat, 0.025 15-00553-31 5015006029 Shim, Heater, .031", Flat 15-00554-05 5015006025 Shim, Heater, .005", V-Type 15-00554-10 5015006024 Shim, Heater, .010", V-Type 15-00554-18 5015006196 Shim, Heater, 0.018", V-Type 15-00554-25 5015006201 Shim, V Typw, 0.025 15-00554-31 5015006026 Shim, Heater, .031", V-Type 15-00558-01 5015006052 Sleeve, Lead, Htr, 2.00", Ceramic 15-00558-02 5015006053 Sleeve, Lead, Htr, 2.75", Ceramic 15-00567-00 5015006031 Cap, TC, 1/8" ID, Ceramic 15-00578-00 Rev.D 5015006083 Sleeve, Flanged, Feedthru, Htr, Ceramic 15-00614-00 5015006030 Cap, TC, 1/16" ID, Ceramic 15-00653-00 5015006186 Spindle Hub Mount Clamp 15-00654-00 5015006002 Clamp, Adjustment, Rotation  15-00684-00 5015006098 Cap,TC,1/16"ID,Ceramic 15-00685-00 5015006046 Feedthru, O-Seal, 3/8", UltraTorr 15-00686-00  5015006049 Washer, Feedthru, 1/2" ID, Aluminum 15-00698-00 5015006012 Screw, Fork 15-00699-01 5015006007 Finger, Fork, 7.5" 15-00700-00 5015006105 Plate, Retainer, Fork, Bottom 15-00701-00 5015006001 Fork, Plate, Bottom  15-00702-00 5015006106 Plate, Retainer, Fork, Top  15-00703-00 5015006000 Fork, Plate, Top  15-00721-00 5015006036 Washer, #8 Ni 15-00729-00 5015006003 Clamp, Flat 15-00730-00 5015006004 Flange, Keyed  15-00731-00 5015006006 Bushing, Keyed, Ceramic 15-00839-00 5015006132 Screw, Ni 1/4-20 x .9 LG 15-00866-00 5015006127 Spring, Ceramic 15-00932-00 5015006107 Screw, 1/4-20 x .50" LG, Nickel (Concept Two) 15-00935-01 5015006093 Screw, 10-32 X .5, Ni  15-00935-01 (Mod.) 5015006162 Screw, Hex, Socket, Nickel 15-00951-00 5015006014 Cup, Screw Cover 15-00982-00 5015006167 Shaft, Spindle 15-01049-00 5015006212 Paddle, 6", Molybdenum 15-01049-00 5015006213 Paddle, 6", Ceramic 15-01050-01 5015006260 Shims, Paddle, 0.002" Thick 15-01050-02 5015006261 Shims, Paddle, 0.003" Thick 15-01050-03 5015006262 Shims, Paddle, 0.005" Thick 15-01103-00 Rev A 5015006171 Shaft, Lift, Ring 15-01104-00 5015006110 Screw, 10-32 x .75, Nickel 200 15-01104-00 5015006129 Screw, 10-32 x .75, Ni (0.100 Shoulder) 15-032014-01 5015066003 Window, Quartz, EP Option 15-024611-00 Rev. C 5015006161 Arm, Robot 15-024881-00 5015006155 Fork, End, Cap 15-028766-00 5015006125 Ring, Guard, 200mm 15-032014-00 5015066004 Window, Quartz, Etch Resistant 15-032016-00 5015006178 Pin, Insert, Ceramic 15-032451-00 5015006126 Window, Chamber, Lexan 15-032452-00 5015006126 Window, Lexan, Chamber 15-032502-00 5015006111 Pin, Lift, Wafer 15-032631-00  5015006080 Flange, Keyed 15-032777-00 5015006118 Ring, Moer, 2.00 15-032939-00 5015006169 Ring, Moer, 2.25mm 15-033278-00 5015006144 Ring, V-Port  15-033279-00 5015006145 Viewport, Lexan 15-033874-00 5015006142 Plug, Injector, Manifold 15-033947-00 5015006124 Plate, Cover, 200mm (P.E.C.) 15-034333-00 5015006117 Tube, Injector, Process 15-034851-00