STS Please contact VTI for module repair, part duplication and custom design services. OEM PN VTI PN DESCRIPTION 471550 5045006012 M4x10mm Caphead Screw 111967 E01 5045006030 Generic Electrode Shield Ring 112160 E02 5045006027 Pin Assembly Plate 112368 E01 5045006004 Ceramic Quad Clamp Support Ring 112537 E03 5045006011 Hanger Rod 11291 E02 5045006002 M4 Screw Shield Cap 1C7133 5045006013 PTFE Foot 4P1500 5045006015 M4 Nut A11292 D01 5045006003 100mm Ceramic Finger Quadrant Clamp A11292 D01 6044000001 100mm Quadrant Clamp Assembly AS301177-02 6044000003 Platen Spring Pin Assembly DT301137-02 5045006028 Platen Inner Screw DT301176-02 5045006026 Pin Assembly Pin DT303547-02 5045006031 Generic 100mm Electrode Shield DT307154-01 5045006009 Anodized Finger Clamp DT307162 5045006033 Source Shield DT307391-01 5045006025 Electrode Shield (Quartz) DT307392-01 5045006022 100mm Platen Shield DT301176-02 5045006023 100mm Flat Platen (RE) FB301117 5045006019 Slice Lift Tripod Assy   5045006000 Chuck Top Shield   5045006001 Chuck Lower Shield   5045006005 100mm Quad Clamp Ring   5045006006 Ceramic Wafer Holder   5045006007 Hanger Rod Screw   5045006008 Ceramic Liner   5045006010 100mm Weight Quadrant   5045006014 M4 X 55mm Slotted Panhead Screw   5045006016 M4x16mm Vented Set Screw   5045006017 M4x12mm Caphead Screw   5045006018 Modified Ceramic Wafer Holder   5045006020 102mm Ceramic Wafer Holder   5045006021 Etcher 24 Chuck Platen   5045006024 Etcher 24 Gas Feed   5045006029 102mm Aluminum Wafer Holder   5045006032 Ceramic Inner Electrode Ring   5045006034 STS Showerhead   6044000002 ICP Quick Clean Kit   6112000000 ICP Chamber Weighted Clamp             Didn't find what you were looking for? Please contact VTI for module repair, part duplication and custom design services.

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