STS

Please contact VTI for module repair, part duplication and custom design services.

OEM PN VTI PN DESCRIPTION
471550 5045006012 M4x10mm Caphead Screw
111967 E01 5045006030 Generic Electrode Shield Ring
112160 E02 5045006027 Pin Assembly Plate
112368 E01 5045006004 Ceramic Quad Clamp Support Ring
112537 E03 5045006011 Hanger Rod
11291 E02 5045006002 M4 Screw Shield Cap
1C7133 5045006013 PTFE Foot
4P1500 5045006015 M4 Nut
A11292 D01 5045006003 100mm Ceramic Finger Quadrant Clamp
A11292 D01 6044000001 100mm Quadrant Clamp Assembly
AS301177-02 6044000003 Platen Spring Pin Assembly
DT301137-02 5045006028 Platen Inner Screw
DT301176-02 5045006026 Pin Assembly Pin
DT303547-02 5045006031 Generic 100mm Electrode Shield
DT307154-01 5045006009 Anodized Finger Clamp
DT307162 5045006033 Source Shield
DT307391-01 5045006025 Electrode Shield (Quartz)
DT307392-01 5045006022 100mm Platen Shield
DT301176-02 5045006023 100mm Flat Platen (RE)
FB301117 5045006019 Slice Lift Tripod Assy
  5045006000 Chuck Top Shield
  5045006001 Chuck Lower Shield
  5045006005 100mm Quad Clamp Ring
  5045006006 Ceramic Wafer Holder
  5045006007 Hanger Rod Screw
  5045006008 Ceramic Liner
  5045006010 100mm Weight Quadrant
  5045006014 M4 X 55mm Slotted Panhead Screw
  5045006016 M4x16mm Vented Set Screw
  5045006017 M4x12mm Caphead Screw
  5045006018 Modified Ceramic Wafer Holder
  5045006020 102mm Ceramic Wafer Holder
  5045006021 Etcher 24 Chuck Platen
  5045006024 Etcher 24 Gas Feed
  5045006029 102mm Aluminum Wafer Holder
  5045006032 Ceramic Inner Electrode Ring
  5045006034 STS Showerhead
  6044000002 ICP Quick Clean Kit
  6112000000 ICP Chamber Weighted Clamp
     
     

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Please contact VTI for module repair, part duplication and custom design services.


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