|
 |
SVG |
Please contact VTI for module repair, part duplication and custom design services.
| OEM PN |
VTI PN |
DESCRIPTION |
| SVG-00-50083 R
B |
5002506008 |
Chuck, Delrin, One-Piece |
| SVG-01-00-515-04 |
5002101003 |
Bearing |
| SVG-06734-08 |
5002506015 |
Chuck, Developer, Teflon, 4 1/2" for
6" |
| SVG-100-001 |
5002104002 |
Sensor,
Optical |
| SVG-100-032 |
5002104003 |
Sensor,
Capacitive Proximity |
| SVG-103-11011 |
5002104000 |
Transistor |
| SVG-112-001 |
5002103001 |
Motor, 24 VDC,
Gear 5.9:1 |
| SVG-112-010 |
5002103000 |
Motor, 6 VDC,
Gear 5.9:1 |
| SVG-112-011 |
5002103002 |
Motor, 12 VDC,
Gear 19.7:1 |
| SVG-112-012 |
5002103003 |
Motor, 15 VDC,
5.4:1 |
| SVG-112-018 |
5002103004 |
Motor, 12 VDC,
19.7:1 |
| SVG-112-019 |
5002103005 |
Motor, 24 VDC,
19.7:1 |
| SVG-112-038 |
5002103006 |
Motor, 24 VDC,
10:1 |
| SVG-112-040 |
5002103007 |
Motor, 30 VDC,
38.3:1 |
| SVG-112-071 |
5002103009 |
Motor, 121 VDC,
65.5:1 |
| SVG-114-001 |
5002102008 |
Valve, 24 VDC, 3
Way |
| SVG-114-006 |
5002102005 |
Valve, 24
VDC |
| SVG-114-007 |
5002102006 |
Valve, 24 VDC, 7
W |
| SVG-18416-01 |
5002106001 |
Chuck, Coater,
150 mm Wafers |
| SVG-201-002 |
5002101004 |
Bearing |
| SVG-201-005 |
5002101005 |
Bearing |
| SVG-201-010 |
5002101006 |
Bearing |
| SVG-201-017 |
5002101007 |
Bearing,
Seal |
| SVG-201-031 |
5002101008 |
Bearing, Linear
Bushing |
| SVG-201-036 |
5002101009 |
Bearing |
| SVG-201-040 |
5002101010 |
Bearing,
Flanged |
| SVG-201-081 |
5002101011 |
Bearing |
| SVG-201-082 |
5002101012 |
Bearing |
| SVG-201-083 |
5002101013 |
Bearing |
| SVG-202-011 |
5002101002 |
Belt |
| SVG-202-017 |
5002101001 |
Belt |
| SVG-202-018 |
5002101000 |
Belt |
| SVG-203-016 |
5002102000 |
Cylinder,
Air |
| SVG-203-018 |
5002102001 |
Cylinder,
Flat |
| SVG-203-025 |
5002102002 |
Cylinder,
Air |
| SVG-203-035 |
5002102003 |
Cylinder,
Air |
| SVG-203-044 |
5002102004 |
Cylinder,
Air |
| SVG-219-006 |
5002102010 |
Kit, Seal,
Valve |
| SVG-219-007 |
5002102011 |
Kit, Seal,
Fluid |
| SVG-219-008 |
5002102012 |
Kit, Seal,
Air |
| SVG-219-009 |
5002102013 |
Kit,
Separator |
| SVG-30048-01 |
5002506014 |
Chuck, Delrin, 8600 |
| SVG-918247-001 |
5002106008 |
Cable,
Hoist-SCPL |
| SVG-99-00269 |
5002102009 |
Valve, 24
VDC |
| SVG-99-04013-02 |
5002103008 |
Motor, Stpng,
Linear Actuator-Hot Plate |
| SVG-99-06635-03 |
5002506007 |
Ring, Air, 3" |
| SVG-99-80001-01 |
5002104001 |
Sensor, Double,
PCB |
| |
5002101014 |
Spindle Assembly
Bearing for Chuck Vac |
| |
5002101015 |
Spindle Assembly
Seal for Chuck Vac |
| |
5002101017 |
Top, Cup, Coater,
Delrin |
| |
5002101018 |
Top, Cup, Coater,
SS |
| |
5002101019 |
Liner, Cup,
Coater, wo/Draft, Delrin |
| |
5002101020 |
Liner, Cup,
Coater, w/Draft, Delrin |
| |
5002101021 |
Cup, Coater,
Split, Piece, One, Delrin |
| |
5002101022 |
Ring, Insert,
Large (SVG - 8100) |
| |
5002101023 |
Ring, Insert,
Small (SVG - 8100) |
| |
5002102007 |
Valve, 24
VDC |
| |
5002106002 |
Chuck,
2.25 |
| |
5002506000 |
Bowl, Coater, Delrin |
| |
5002506001 |
Cover, Bowl, Delrin |
| |
5002506002 |
Insert, Cup, Coater, Delrin |
| |
6002200012 |
Cup, Coater,
Delrin |
| |
6002200032 |
Cover, Plate,
Hot |
| |
6010000002 |
Assy, Chuck, SVG, Modified |
| |
6010000003 |
Assy, Chuck,
SVG |
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