|
 |
Tegal |
Please contact VTI for module repair, part duplication and custom design services.
| OEM PN |
VTI PN |
DESCRIPTION |
| 29-213-001 |
6036000002 |
Kit,
O-Ring |
| 37-221-003B |
5013006022 |
HP,
Electrode, Upper |
| 39-344-001E |
6036000003 |
Head, Shower |
|
39-685-005 |
5013006002 |
Ring, AL, Anodized |
| 40-244-003 |
5013006019 |
Ring, Torlon |
| 40-249-003 |
5013006006 |
Ring, Ceramic, Beveled
Edges |
| 40-284-005 |
5013006009 |
Ring, Quartz,
6" |
| 40-284-005 |
5013006021 |
Ring, Quartz, 6",
New |
| 40-289-003 |
5013006001 |
Ring, Macor |
| 40-289-003 |
5013006005 |
Ring, Ceramic (99.5%
Alumina) Rev B |
| 40-289-005 |
5013006004 |
Ring, Macor (900 Series
Etcher) |
| 40-516-007 |
5013006007 |
Ring, Ceramic |
| 40-516-007 |
5013006008 |
Ring, Macor,
Beveled |
|
80-200-342 |
5013006016 |
Pin, Retainer, Clip |
|
91-10820-001 |
5013006024 |
Electrode, Upper |
| |
5013006000 |
Ring, Quartz |
| |
5013006003 |
Ring, Anodized, Al,
Modified |
| |
5013006011 |
Holder, Pin,
Lift |
Didn't find what you were looking for?
Please contact VTI for module repair, part duplication and custom design services.
|
|
