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TEL
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Please contact VTI for module repair, part duplication and custom design services.
| OEM PN |
VTI PN |
DESCRIPTION |
| 022-101324-1 |
5003101003 |
Bearing |
| 022-101377-1 |
5003101000 |
Bearing |
| 022-101387-1 |
5003101004 |
Bearing |
| 024-000016-1 |
5003102016 |
Valve, Vacuum
(Mark 2) |
| 024-001529-1 |
5003102002 |
Assembly, Valve,
Coater |
| 024-001617-1 |
5003102012 |
Regulator (D.I.W.,
I.W.) |
| 024-001926-1 |
5003102011 |
Gauge,
Pressure |
| 024-003220-1 |
5003102008 |
Actuator,
Rotary |
| 024-004186-1 |
5003102014 |
Valve, 2
Way |
| 024-004437-1 |
5003102000 |
Dispense, Rotary,
90 Deg, Actuator |
| 024-005520-1 |
5003102015 |
Valve,
Check |
| 024-0303502-1 |
5003102013 |
Valve,
Relief |
| 027-100288-1 |
5003102001 |
O-Ring, 2.167 Size
.103 Thk (Coater) |
| 032-000005-1 |
5003001020 |
Washer, M3, SUS304 |
| 032-000251-1 |
5003001019 |
Washer, M3, SUS304 |
| 080-101490-1 |
5003103001 |
Arm, Load,
Ceramic |
| 2910-290041-12 |
5003006061 |
Tweezers, 8" |
| 2985-419058-12 |
6008000021 |
Assembly, Tweezers |
| 3M10-40553-11 |
5003001016 |
Screw, MSx30-SH,H4, Etcher |
| 310-211696-2 |
5003106000 |
Chuck, Teflon
w/Shaft Adapter |
| 310-290647-7 |
5003006062 |
Pincette |
| 1010-410350-11 |
5003006093 |
Clip, Cover, Gap, B T (PE) Etcher |
| 1110-422926-11 |
5010006015 |
Fitting, Exchangeable, (DS) |
| 1187-019931-12 |
5003006092 |
Tube, Assembly, G4-250, Etcher |
| BB10-100332-12 |
5003006098 |
Holder, Suseptor, Quartz, MB2-730 |
| 1331810-429138-11 |
5003006091 |
(I.P.B.), (UP), Tube , Connection, He |
| 1810-430850-11 |
5003006097 |
(HE), Pipe, Support |
| 1810-431200-11 |
5003006095 |
Pipeholder, Support, Chiller, Etcher |
|
1910-430175-12 |
5003006041 |
Block, Wafer, Teflon, 8" |
|
CT020-001727-1 |
5003001022 |
Screw, Flathead, Phillips, M2x3, SS |
|
CT1310-498062-11 |
5003006031 |
Spacer, Sopper |
| CT-310-290498-2 |
6008100005 |
Chuck, Spin, 6", Modified |
|
CT-1310-290833-13 |
5003006068 |
Indexer Ceramic Arm |
|
CT-2910-303022-12 |
5003006121 |
(Tweezers), Pincette, Inch, 8 |
|
ID05-400022-14 |
5003006067 |
Window |
| 1D10-410350-11 |
5003006093 |
(PE), T, B, Gap, Cover, Lip |
| MBBB10-306339-11 |
5003006103 |
Window, Quartz, Plate, Shield |
|
BB10-400322-12 |
5003006104 |
Pin, Lifter |
|
MBBB10-201849-11 |
5003006106 |
Holder, TC |
| MBBB10-400627-11 |
5003006107 |
Pin, Metal, Ring, Shield |
| |
5003006006 |
Clamp, Anodized, Hard, Small |
| |
5003006009 |
Ring, Teflon, Solid |
| |
5003006010 |
Arm, Pincette, 6" |
| |
5003006012 |
Cap, Teflon, 580 |
| |
5003006013 |
Cap, Teflon, 580 |
| |
5003006015 |
Ring, Focus, Quartz, GE 124 |
| |
5003006016 |
Ring, Shield,
Quartz, GE 144 |
| |
5003006017 |
Ring, Shield, Quartz, GE 124 |
| |
5003006018 |
Screw , Housing |
| |
5003006020 |
Bracket,
Gauge |
| |
5003006024 |
Pin, Proximity, M3000, 0.1 mm |
| |
5003006025 |
Pin, Proximity,
M3000, 0.2 mm |
| |
5003006027 |
Wafer, Spacer, Ceramic |
| |
5003006028 |
Pin, Proximity, Mark V & VII |
| |
5003006029 |
Ring, Pin,
Proximity |
| |
5003006030 |
Pin, Guide |
| |
5003006032 |
Cover,
Plexiglass |
| |
5003006033 |
Door, Panel,
Plexiglass, Mark Vll, Left |
| |
5003006034 |
Door, Panel,
Plexiglass, Mark Vll, Right |
| |
5003006035 |
Cover, Plexiglass,
Mark V, Long |
| |
5003006036 |
Cover, Plexiglass,
Mark V, Short |
| |
5003006040 |
Block, Wafer, Teflon, 6" |
| |
5003101001 |
Bearing |
| |
5003101002 |
Bearing |
| |
5003101005 |
Bearing |
| |
5003101007 |
Bearing,
Non-Shielded |
| |
5003102003 |
Manifold,
Air |
| |
5003102004 |
Valve,
Air |
| |
5003102005 |
Valve, Air,
Track |
| |
5003103000 |
Motor
(Copal) |
| |
5003103003 |
Block, Wafer,
Teflon |
| |
5003106004 |
Ring, Baffle,
Slotted |
| |
5003106005 |
Platform, Baffle,
Teflon |
| |
5003106007 |
Screw, Ring,
Baffle, Teflon |
| |
5003106008 |
Screw, Vespel |
| |
6008000000 |
Bushing, Snap, 2
Pc., Vespel |
| |
6008000002 |
Kit, PM, 5000,
Tel |
| |
6008000005 |
Cover, Plexiglass,
Mark V, Long, Modified |
| |
6008000016 |
Kit, PM, O-Ring,
Semi-Annual, M3000 |
| |
6008000017 |
Kit, PM, O-Ring,
Semi-Annual, Developer, M3000 |
| |
6008000018 |
Kit, PM, O-Ring,
Semi-Annual, Coater, M3000 |
| |
6008000019 |
Kit, PM, O-Ring,
Semi-Annual, Developer, M3000 |
| |
6008100000 |
Assy., Ring,
Baffle |
| |
6008100001 |
Assy, Ring, Vespel Inserts |
| |
6008100005 |
Chuck, Spin,
Modified |
Didn't find what you were looking for?
Please contact VTI for module repair, part duplication and custom design services.
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