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Varian
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Please contact VTI for module repair, part duplication and custom design services.
| OEM PN |
VTI PN |
DESCRIPTION |
| |
71012-001 |
Cassette, Metal, Wafer, Varian, Low
PC |
| VAR-00-664198-00 |
5006306060 |
Cover, Anode, Al |
| VAR-00-664198-00 |
5006306090 |
Cover, Anode, SS |
| VAR-00-664219-00 |
5006306031 |
Shield, Cavity, 4"/5" |
| VAR-00-672057-00 |
5006306098 |
Clip, Wafer |
| VAR-00-672057-00 |
5006306099 |
Clip, Wafer, Modified
|
| VAR-00-672313-00 |
5006106011 |
Piece, Pole, Outer |
|
VAR-00-672313-00 |
5006106014 |
Pole, Piece, Outer, Al |
| VAR-00-674505-00 |
5006306088 |
Ring, Clip, Ceramic, 4" |
| VAR-00-674782-00 |
5006106004 |
Ring, Clip, Ceramic, 5" |
| VAR-00-674830-00 |
5006306032 |
Insert, Table, RF, Etch,
5" |
| VAR-00674841-00 |
5006306097 |
Shield, Table, (3180/3190) |
| VAR-00-678474-01 |
5006106016 |
Shutter,
SS (Perforated Assembly) |
| VAR-00-678475-01 |
5006106019 |
Clamp, Shutter, SS (Perforated
Assembly) |
| VAR-00-678476-01 |
5006106018 |
Insert, Support Shutter, SS
(Perforated) |
| VAR-00-678477-01 |
5006106017 |
Insert, Perforated Shutter, SS
(Perforated) |
| VAR-00-682203-00 |
5006106097 |
Support, Ring, Cooling |
| VAR-00-682216-00 |
5006106001 |
Ring, Ceramic 6" (3280/3290) |
| VAR-00-682229-00 |
5006106096 |
Insert, Piece, Pole |
| VAR-00-682232-00 |
5006106009 |
Insert, Pole, Outer |
|
VAR-00-682232-00 |
5006106012 |
Insert, Pole, Outer, Al |
| VAR-00-682237-00 |
5006106010 |
Insert, Pole, Mid |
|
VAR-00-682237-00 |
5006106013 |
Insert, Pole, Mid, Al |
| VAR-00-682938-00 |
5006306011 |
Shield, Outer, Support, Al |
| VAR-00-682938-00 |
5006106048 |
Shield, Outer, Support, SS |
| VAR-00-683155-00 |
5006106075 |
Shield,
Front, Plate, Curved, SS, #2 |
| VAR-00-684046-00 |
5006101012 |
Washer, Turner, SS |
| VAR-00-683155-00 |
5006106076 |
Shield,
Front, Plate, Curved, SS, #1 |
| VAR-00-684046-00 |
5006101012 |
Washer, Turner, SS |
| VAR-00-685958-00 |
5006306095 |
Ring, Target, 3180/3190 |
| VAR-00-685965-00 |
5006306074 |
Shield, Ring, Cooling,
3180/3190 |
| VAR-04-715865-01 |
5006106093 |
Shield, Cavity, Al, 6" |
| VAR-04-715865-01 |
5006106094 |
Shield, Cavity, 6" |
| VAR-04-716197-01B |
5006306093 |
Assy, Collimator, Titanium |
| VAR-04-716197-02 |
5006306091 |
Assy, Collimator, Titanium |
| VAR-04-716197-02E |
5006306064 |
Assy, Collimator, Titanium |
| VAR-04-716610-01 |
5006306053 |
Clamp, Upper, Titanium, 200mm |
| VAR-04-717629-01 |
6006100005 |
Assy,
RF-Ignitor |
| VAR-5300019 |
5006102000 |
Gauge,
Ionization (Implanter 572) |
| VAR-BB10157306R3 |
5006306050 |
Shield,
Cylinder, 200mm, SS |
| VAR-BB10157306R3 |
5006306049 |
Shield,
Cylinder, 200mm, Al |
| VAR-BB10157492 |
5006306062 |
Shield,
Space, Dark, SS |
| VAR-BB10157492 |
5006306063 |
Shield,
Space, Dark, Al |
| VAR-BB10157641 |
5006306056 |
Clamp,
Lower, CDS, SS |
| VAR-BB10157641 |
5006306057 |
Clamp,
Lower, CDS, Al |
| VAR-BB10157664 |
5006306065 |
Shield,
Bottom, Chamber, SS |
| VAR-BB10157664 |
5006306066 |
Shield,
Bottom, Chamber, Al |
| VAR-C108305001 |
5006006003 |
Head,
Wafer Lift 150mm,(Implanter) |
|
VAR-E17063160 |
5006306081 |
Plate, End |
| |
5006006008 |
Shield,
Shutter, SS (3190/3290) |
| |
5006006009 |
Ring,
Cooling (3290) |
| |
5006006010 |
Shield,
Shutter Improved, Al |
| |
5006006013 |
Sleeve,
Ceramic (Varian Implanter) |
| |
5006106006 |
Ring,
Ceramic 6" Nickel Plated (3280/3290) |
| |
5006106007 |
Ring,
Ceramic 6" (99.5) |
| |
5006106021 |
Ring,
Clip, Insert, SS (Varian 3280/3290) |
| |
5006106042 |
Cover,
Plate, Shield |
| |
5006106043 |
Liner,
Heater, Improved (3290) |
| |
5006106044 |
Shutter, Disposable |
| |
5006106045 |
Shutter,
5", Modified |
| |
5006106053 |
Ring,
Cover, SS |
| |
5006106067 |
Shield,
Hat, Al |
| |
5006106068 |
Tip,
Actuator, Clip |
| |
5006106068 |
Tip,
Actuator, Clip (Vespel) |
| |
5006106070 |
Shield, Isolation, SS |
| |
5006106071 |
Shield, Isolation, SS |
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5006106072 |
Shield, Isolation, SS |
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5006106077 |
Shield,
SS (Model 3290) |
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5006106079 |
Shield,
SS (Model 3290) |
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5006106081 |
Shield,
Heater, 4", SS |
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5006106084 |
Shield,
Heater, Cover, Back, SS |
| |
5006106085 |
Shield,
Heater, SS |
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5006106092 |
Ring, Clip, Ceramic, 6" |
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5006306005 |
Shield,
Cavity, Hole, 3", SS |
| |
5006306006 |
Shield, Hat, SS |
| |
5006306007 |
Shield, Middle, Large, SS |
| |
5006306009 |
Shutter, Modified, 5", Al |
| |
5006306015 |
Shield, Cavity, 6", SS |
| |
5006306017 |
Shield,
Cavity, 9", Al |
| |
5006306022 |
Shutter,
Disposable, SS |
| |
5006306026 |
Shield,
Isolation, Middle, SS |
| |
5006306089 |
Ring, Cover, SS, 4" |
| |
5006306092 |
Plug, Ceramic |
| |
5006306104 |
Shield, Ram, Lock, Load |
| |
5006306105 |
Port, W/2", Hat, Top |
| |
5006306106 |
Shield, Cover, Ram |
| |
5006306109 |
Shield, Block, Heater |
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5006706000 |
Diffuser, Gas, Al |
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6006000000 |
Shutter,
Perforated, SS (Assembly) |
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6006000002 |
Kit,
Shielding, Isolation, SS |
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6006000003 |
Kit,
Shielding, Isolation, Al |
| |
6006000005 |
Plate,
Pressure, Varian 3180 |
| |
6006100005 |
Ignitor,RF |
| |
6006100007 |
Assy, Plate, Pressure, Large, Al
(3290) |
| |
6006100009 |
Assy,
Plate, Pressure, Spray, Flame, SS |
| |
6006100011 |
Assy,
Plate, Pressure, SS |
| |
6006300000 |
Shield,
SS |
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Please contact VTI for module repair, part duplication and custom design services.
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