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VariTech's Wafer Handling Products |
Please contact VTI for module repair, part duplication and custom design services.
| VTI PN |
DESCRIPTION |
|
WAFER ESCALATORS |
| 70001-1001 |
Escalator, Wafer, 5", Antistatic |
70001-1002 |
Escalator, Wafer, 6", Antistatic |
| 70001-1003 |
Escalator, Wafer, Antistatic, 6", Modified |
| 70001-1004 |
Escalator, Magnifying, 4/5/6" Combo |
| 70001-1005 |
Escalator, Wafer, 6" |
| 70001-1006 |
Escalator, Wafer, Antistatic, 6", Modified |
| 70001-1007 |
Escalator, Wafer, 200mm, Modified |
| 70001-2000 |
Escalator, Wafer, 8", Antistatic |
|
FLAT ALIGNERS |
| 70002-1000 |
Flat Aligner, Antistatic, 6" |
| 70002-1001 |
Flat Aligner, Auto, Antistatic, 6" |
| 70002-1002 |
Flat Aligner, Square Base, Antistatic, 6" |
| 70002-1003 |
Flat Aligner, Antistatic, 4" |
| 70002-1004 |
Flat Aligner, Antistatic, Combo (4," 5," 6") |
| 70002-1007 |
Finder, Notch, Antistatic, 6" |
| 70002-2000 |
Notch Aligner, Antistatic, 8" |
|
WAFER
PRESENTERS |
| 70003-1000 |
Presenter, Wafer, Antistatic, 6" |
| 70003-1001 |
Presenter, Wafer, Antistatic, 5" |
| 70003-1002 |
Presenter, Wafer, Antistatic, 4" |
| 70003-1003 |
Presenter, Wafer, Antistatic, 6", Modified |
| 70003-1004 |
Presenter, Angled, Antistatic, 4" |
| 70003-1005 |
Presenter, Wafer, Single, 6" |
| 70003-1006 |
Presenter, Wafer, Arm, Finger, Single |
| 70003-1007 |
Presenter, Single Wafer, 6," UHMW |
| 70003-1008 |
Pre-Aligner, Wafer-Presenter, 200mm, Modified |
| 70003-1010 |
Tool, Inspection, Wafer, Backside, 6" |
| 70003-2000 |
Presenter, Wafer, Antistatic, 8" |
| 70003-2002 |
Tool, Inspection, Wafer, Backside,
8" |
|
WAFER TRANSFER SLIDE |
| 70004-1000 |
WTS, Antistatic, 4/5/6" Combo |
| 70004-1001 |
WTS, Wafer, Flip |
| 70004-1002 |
WTS, Antistatic, 4/5/6" Combo, Extended |
| 70004-1003 |
WTS, Container, Transport, 3" |
| 70004-1004 |
WTS, Container, Transport, 4" |
| 70004-1005 |
WTS/Flat Aligner Combo, 4/6" |
| 70004-1006 |
WTS, w/o Turntable, Ergonomic, 6" |
| 70004-1007 |
WTS, Lock, Combo |
| 70004-1008 |
WTS, Contact, Direct |
| 70004-1009 |
WTS/Flat Aligner/Escalator, 4/6" Three Way Combo |
| 70004-1012 |
WTS, Odd/Even, Antistatic, 6" |
| 70004-1013 |
WTS/Flat Aligner/Presenter, ESD 4/6" |
| 70004-1014 |
WTS/Flat Aligner/Escalator, ESD, 4/6" |
| 70004-1015 |
WTS, Modified |
| 70004-1016 |
WTS, Modified |
| 70004-1017 |
WTS, Modification |
| 70004-1018 |
WTS, Hi-Temp, Modification |
| 70004-1019 |
WTS, Arsenide/Gallium Combo |
| 70004-1020 |
WTS, Horizontal, Odd/Even |
| 70004-1021 |
WTS, Fluoroware, Varian, 5" |
| 70004-1022 |
WTS, Enclosed Base |
| 70004-1023 |
WTS, Fluoroware, ASM |
| 70004-1024 |
WTS/Flat Aligner/Presenter, Combo (4," 6") |
| 70004-1025 |
WTS/Flat Aligner/Presenter (Single), Combo
(4,"6") |
| 70004-1026 |
WTS, Odd/Even, Antistatic, 4" & 6" |
| 70004-1027 |
WTS, 8" |
| 70004-1028 |
WTS, Stationary, 6" |
| 70004-1029 |
WTS, Stationary, 200mm |
| 70004-1030 |
WTS, Antistatic, Combo (4," 5," 6"), Poly-Urethane
Face |
| 70004-1031 |
WTS, Split, 4-way, 150mm |
| 70004-1032 |
WTS, Split, 4-way, 200mm |
| 70004-1033 |
WTS, Half-lot, 150mm |
| 70004-1034 |
WTS, Half-lot, 200mm |
| 70004-1035 |
System, Locking, Cassette, WTS, 200mm |
| 70004-1039 |
WTS, High/Low, Anti-Static |
| 70004-2000 |
WTS, 6/8" Combo |
| 70004-2001 |
WTS, Antistatic, 8" |
|
WAFER HANDLERS |
| 70005-1100 |
Handle, Wafer, Wafirm, 3" |
| 70005-1200 |
Handle, Wafer, Wafirm, 4" |
| 70005-1201 |
Handle, Wafer, Wafirm, 4", Modified |
| 70005-1300 |
Handle,
Wafer, Wafirm, 5" |
| 70005-1400 |
Handle, Wafer, Wafirm, 6" |
| 70005-1500 |
Handle, Wafer, Wafirm, 8" |
| 70005-2000 |
Handle, Reticle, 6x6 |
| 70005-2001 |
Handle, Reticle |
| 70005-2002 |
Handle, Reticle, Modified |
| 70005-2003 |
Pick, RSG |
| 70005-2004 |
Pick, Photo, 35-Degree Angle |
| 70005-2400 |
Handle, Reticle, 6x6 |
| 70005-3100 |
Tweezer, 3" |
| 70005-3101 |
Tweezer, Lip, Flat |
| 70005-3102 |
Tweezer, Wafer, 1" |
| 70005-3103 |
Tweezer, w/ Teflon Coated Finger, 1" |
| 70005-3200 |
Tweezer, handling, Wafer, 4" |
| 70005-3201 |
Tweezer, 4mm, Type L |
| 70005-3202 |
Tweezer, w/ Teflon Coated Fingers, 4mm |
| 70005-3400 |
Tweezer, Handling, Wafer, 6" |
| 70005-3401 |
Tweezer, Safe-Lock |
| 70005-3500 |
Tweezer, handling, Wafer, 8" |
| 70005-4200 |
Handle, Cassette, 3/4" |
| 70005-4201 |
Handle, Boat, Quartz |
| 70005-4400 |
Handle, Boat, 6" |
| 70005-4401 |
Handle, Boat, Quartz, 6" |
| 70005-4402 |
Handle, Cassette, Novellus, 6" |
| 70005-4403 |
Handle, Cassette, 6" |
| 70005-4404 |
Handle, Cassette, Teflon |
| 70005-4500 |
Handle, Cassette, Mattson, 8" |
| 70005-5000 |
Tool, Removal, Pellicle, Non-Contact |
| 70005-5001 |
Tool, Removal, Pellicle, Dual |
| 70005-5002 |
Tool, Removal, Pellicle, Dual, Modified |
| 70005-5003 |
Tool, Removal, Pellicle |
|
CASSETTES |
| 71001-1100 |
Cassette, Aluminum, 4" |
| 71001-1101 |
Cassette, Aluminum, 3" |
| 71001-1102 |
Cassette, Tester, Jig, Q.C., 4" |
| 71001-1200 |
Cassette, Aluminum, 5" |
| 71001-1201 |
Cassette, w/ Solid Top/Bottom, Aluminum,
5" |
| 71001-1202 |
Cassette, Aluminum, 5", Modified |
| 71001-1203 |
Cassette, Tester, Jig, 5" |
| 71001-1204 |
Cassette, Tool, Alignment |
| 71001-1205 |
Cassette, Tool, Alignment, 5" |
| 71001-1300 |
Cassette, Metal, 6" |
| 71001-1301 |
Cassette, w/ Handle, Aluminum, 6" |
| 71001-1302 |
Cassette, Aluminum, 6", Modified |
| 71001-1303 |
Cassette, Tester, Jig, Q.C., 6" |
| 71001-1304 |
Cassette, Metal, Thru, Modified, 6" |
| 71001-1400 |
Cassette, Aluminum, 8" |
| 71001-1500 |
Cassette, Holder, Plate, Reticle, KLA |
| 71001-2300 |
Cassette, Mattson, 6" |
| 71001-2301 |
Cassette, Coated, Teflon Impregnated, 6" |
| 71001-2302 |
Cassette, w/ Handle Plates, Coated, Teflon
Impregnated, 6" |
| 71001-2400 |
Cassette, Anodized, Hard, 8" |
| 71001-2401 |
Cassette, Solid Top w/ Handle, Coated, Teflon
Impregnated, 8" |
| 71001-2402 |
Cassette, Mattson, 8" (w/ Side Plates) |
| 71001-3300 |
Cassette, Aluminum, Novellus, 6" |
| 71001-3400 |
Cassette, Novellus, 8" |
| 71001-4100 |
Cassette, Aluminum, Varian, 4" |
| 71001-4101 |
Cassette, Aluminum, MD, 4" |
| 71001-4102 |
Cassette, Metal, 4", Rounded |
| 71001-5500 |
Cassette, Reticle, ASM |
| 71002-1100 |
Cassette, Teflon, 4" |
| 71002-1200 |
Cassette, Teflon, 5" |
| 71002-1300 |
Cassette, Teflon, 6" |
| 71002-1400 |
Cassette, Teflon, 8" |
| 71003-5200 |
Cassette, ASM, 125mm |
| 71003-5300 |
Cassette, ASM, 150mm |
| 71004-1100 |
Cassette, Stainless Steel, 4" |
|
MISCELLANEOUS PARTS |
|
5099006096 |
Arm, Load, 300 mm, Ceramic |
| 73001-2000 |
Cabinet, Purge, Nitrogen |
| 73001-2001 |
Cabinet, Storage, Purged, N2, 6
Compartment |
| 73001-2002 |
Box, Purge, Nitrogen, Large |
| 73001-2003 |
Box, Purge, Nitrogen, Small |
| 73001-2004 |
Pallot, Injector |
| 73001-2005 |
Station, Work, SEM, PP |
| 73001-2006 |
Cabinet, Purge, Nitrogen, SOG, 8" |
| 73001-3000 |
Cabinet, Purge, Nitrogen, Gate-Oxide |
| 73001-3001 |
Cabinet, Purge, Nitrogen, WJ |
| 73001-3002 |
Station, Inspect, Light, Particle, Wafer |
| 73001-3003 |
Box, N-Spec, Light, Bright, SS |
| 73001-3004 |
Station, Work, SEM, SS |
| 73001-4000 |
Cabinet, Purge, Nitrogen, Quartz |
| 73002-2000 |
Table, Injector |
| 73002-3000 |
Table, Cleaning, WJ 1500 |
| 73002-3001 |
Table, Injector, WJ, SS, 1000 |
| 73002-3002 |
Table, Cleaning, WJ 999 |
| 74003-1210 |
Chuck, DS-1 1C, ESC, Repair |
| 75000-1000 |
Tool,
Cleaning, E-Chuck, Ceramic |
| 79001-1000 |
Tool, Uniformity, EBR |
| 79001-1001 |
Tool, Uniformity, EBR, Modified |
| 79001-1002 |
Pod, Reticle, 1x, Aluminum |
| 79001-1003 |
Tool, Alignment, Showerhead 6" |
| 79001-1004 |
Tool, Alignment, Showerhead, 8" |
| 79001-1005 |
Tool, Alignment, Showerhead, 8", Maxus |
| 79001-1006 |
Tool, Alignment, Showerhead, 8", Modified |
| 79001-1007 |
Tool, Centering, Heater |
| 79001-1008 |
Tool, Alignment,
Showerhead, 6",
Modified |
| 79001-1009 |
Tool, Uniformity, EBR |
| 79002-1000 |
Pourer, Bottle |
| 79002-1001 |
Funnel, Teflon (w/ chain) |
| 79002-1002 |
Holder, Dish, Petri, Teflon |
| 79005-1000 |
Rod, Fork, Boat, Vespel |
| 79005-1001 |
Carrier, Quartz, Chambered |
| 79005-1002 |
Rack, Quartz |
| 79005-1003 |
Carrier, Quartz |
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